Monolithic ink-jet printhead having heater disposed between dual ink chambers and manufacturing method thereof
    1.
    发明公开
    Monolithic ink-jet printhead having heater disposed between dual ink chambers and manufacturing method thereof 有权
    用于制造Dennen酒店两个墨腔室,和方法之间的具有整体式喷墨打印头的加热元件

    公开(公告)号:EP1422063A1

    公开(公告)日:2004-05-26

    申请号:EP03257345.3

    申请日:2003-11-20

    IPC分类号: B41J2/14 B41J2/16

    摘要: A monolithic ink-jet printhead and a method for manufacturing the same are provided. The monolithic ink-jet printhead includes a heater disposed between two ink chambers. In the monolithic ink-jet printhead, a lower ink chamber filled with ink to be ejected is formed on the upper surface of a substrate, and a manifold for supplying ink to the lower ink chamber is formed on the bottom surface of the substrate. An ink channel is disposed between the lower ink chamber and the manifold and perpendicularly penetrates the substrate. A nozzle plate has a plurality of passivation layers stacked on the substrate and a metal layer stacked on the passivation layers. In the nozzle plate, an upper ink chamber is formed on the bottom surface of the metal layer, and a nozzle connected to the upper ink chamber is formed on the upper surface of the metal layer, and a connection hole connecting the upper ink chamber and the lower ink chamber is formed in and penetrates the passivation layers. A heater is provided between the passivation layers and is located between the upper ink chamber and the lower ink chamber for heating ink contained in the ink chambers. A conductor is provided between the passivation layers and is electrically connected to the heater to apply a current to the heater. Since most of heat energy generated from the heater is transferred to ink and a rise in the temperature of the printhead is suppressed, energy efficiency and operating frequency can be increased and the printhead can operate in a stable manner for a long time.

    摘要翻译: 本发明提供一种整体的喷墨打印头及其制造方法。 该整体式喷墨打印头包括两个油墨室之间设置的加热器。 在该整体式喷墨打印头中,填充有墨的下部墨室要喷射形成在基板的上表面,并且供墨到下部墨室的歧管是形成在基片的底表面上。 墨通道在下部墨室和所述歧管之间设置并垂直穿过基材。 喷嘴板具有堆叠在衬底和堆叠在所述钝化层的金属层的钝化层上的多个。 在喷嘴板到上墨室中形成金属层的底表面上,并且连接到上部墨水室的喷嘴被形成在金属层的上表面上,和一个连接孔连接上部墨室和 下部墨室设置在形成并穿透钝化层。 在钝化层之间设置有加热器和位于上墨室和容纳在墨水室用于加热墨水的较低的油墨室之间。 在钝化层之间设置导体和电连接到所述加热器的电流施加到加热器上。 由于大多数从加热器产生热能被传递到油墨和打印头的温度的上升被抑制,能效和操作频率可以增加和打印头能够以稳定的方式很长时间操作。