摘要:
A tunable capacitor (200) using an electrowetting phenomenon includes a first electrode (211); a second electrode (212) which is spaced apart from the first electrode (211) and faces the first electrode (211); a fluidic channel (230) which is disposed between the first electrode (211) and the second electrode (212); a first insulating layer (221) which is disposed between the first electrode (211) and the fluidic channel (221); and a conductive fluid (240) which is disposed in the fluidic channel (230) and moves along the fluidic channel (230) when a direct current (DC) potential difference occurs between the first and second electrodes (211,212). Accordingly, it is possible to fabricate the tunable capacitor (200) with the simplified fabrication process, good reliability and durability, and no restriction on the tuning range.
摘要:
A wafer level package for a surface acoustic wave device (100) and a fabrication method thereof include a SAW device (110) formed with a SAW element (112) on an upper surface of a device wafer (111); a cap wafer (120) joined on an upper part of the SAW element; a cavity part (130) housing the SAW element between the cap wafer and the SAW device; a cap pad (121) formed on an upper surface of the cap wafer; and a metal line (122) formed to penetrate through the cap wafer to electrically connect the cap pad and the SAW element, the device wafer and the cap wafer being made of the same materials.
摘要:
An ultrasonic motor includes a fixed member (30) including a surface, a movable member (20) positioned to face the surface of the fixed member, and an actuator (27) to cause at least a portion of the movable member to contact the surface of the fixed member and cause the movable member to move relative to the fixed member.
摘要:
An ink-jet printhead is provided. The ink-jet printhead comprises an ink chamber (102) filled with ink to be ejected, a manifold, which supplies ink to the ink chamber, an ink channel, which connects the ink chamber and the manifold, a nozzle (106) through which ink is ejected from the ink chamber, first and second heaters (108a,108b), which heat ink in the ink chamber and generate bubbles, and a conductor, which is electrically connected to the first and second heaters and applies a current to the first and second heaters. The first and second heaters are disposed to be symmetrical with each other centering on the nozzle, and one of the first and second heaters is disposed toward the ink channel.
摘要:
An ultrasonic motor includes a fixed member (30) including a surface, a movable member (20) positioned to face the surface of the fixed member, and an actuator (27) to cause at least a portion of the movable member to contact the surface of the fixed member and cause the movable member to move relative to the fixed member.
摘要:
A tunable capacitor (200) using an electrowetting phenomenon includes a first electrode (211); a second electrode (212) which is spaced apart from the first electrode (211) and faces the first electrode (211); a fluidic channel (230) which is disposed between the first electrode (211) and the second electrode (212); a first insulating layer (221) which is disposed between the first electrode (211) and the fluidic channel (221); and a conductive fluid (240) which is disposed in the fluidic channel (230) and moves along the fluidic channel (230) when a direct current (DC) potential difference occurs between the first and second electrodes (211,212). Accordingly, it is possible to fabricate the tunable capacitor (200) with the simplified fabrication process, good reliability and durability, and no restriction on the tuning range.
摘要:
A thermally-driven ink-jet printhead is provided. The thermally-driven ink-jet printhead comprises a substrate (110) on which an ink chamber (106) to be filled with ink to be ejected, a manifold (102) for supplying ink to the ink chamber (106), and an ink channel (104) for connecting the ink chamber (106) and the manifold (102) are formed; first sidewalls (111) and second sidewalls (112), which are formed to a predetermined depth from the surface of the substrate (110) and surround the ink chamber (106) to have a rectangular shape, the first sidewalls (111) being disposed in a widthwise direction of the ink chamber and the second sidewalls (112) being disposed in a lengthwise direction of the ink chamber (106); a nozzle plate (120), which is formed of a plurality of material layers stacked on the substrate and through which a nozzle (108) connected to the ink chamber (106) is formed; a heater (122), which is disposed between the nozzle (108) and each of the first sidewalls (111) inside the nozzle plate (120) to be positioned above the ink chamber; and a conductor (124), which is disposed inside the nozzle plate and electrically connected to the heater (122). Inner surfaces of each of the first sidewalls are uneven, or a pocket is formed in each of the first sidewalls.
摘要:
A monolithic ink-jet printhead and a method for manufacturing the same are provided. The monolithic ink-jet printhead includes a heater disposed between two ink chambers. In the monolithic ink-jet printhead, a lower ink chamber filled with ink to be ejected is formed on the upper surface of a substrate, and a manifold for supplying ink to the lower ink chamber is formed on the bottom surface of the substrate. An ink channel is disposed between the lower ink chamber and the manifold and perpendicularly penetrates the substrate. A nozzle plate has a plurality of passivation layers stacked on the substrate and a metal layer stacked on the passivation layers. In the nozzle plate, an upper ink chamber is formed on the bottom surface of the metal layer, and a nozzle connected to the upper ink chamber is formed on the upper surface of the metal layer, and a connection hole connecting the upper ink chamber and the lower ink chamber is formed in and penetrates the passivation layers. A heater is provided between the passivation layers and is located between the upper ink chamber and the lower ink chamber for heating ink contained in the ink chambers. A conductor is provided between the passivation layers and is electrically connected to the heater to apply a current to the heater. Since most of heat energy generated from the heater is transferred to ink and a rise in the temperature of the printhead is suppressed, energy efficiency and operating frequency can be increased and the printhead can operate in a stable manner for a long time.