公开(公告)号：EP0499490A3

公开(公告)日：1992-08-26

申请号：EP92301263.7

申请日：1992-02-17

申请人： SHIMADZU CORPORATION

发明人： Marui, Takao

IPC分类号： H01J37/295 ,  H01J37/22 ,  H01J31/26 ,  H01J31/48

CPC分类号： H01J37/28 ,  H01J31/48 ,  H01J37/224 ,  H01J37/2955 ,  H01J2237/2445 ,  H01J2237/2544

摘要： A scanning reflection electron diffraction microscope causes a primary electron beam (4) from its electron gun (2) to be reflectively diffracted from a sample (7) and a diffraction pattern to be formed on fluorescent screen (9). An optical lens (10) reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface (11), thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil (12) and a condenser coil (13), the image-carrying electron beam is detected by an electron-multiplier (15) such that a diffraction pattern is displayed on a cathode ray tube (19).

公开(公告)号：EP0576972A1

公开(公告)日：1994-01-05

申请号：EP93109977.4

申请日：1993-06-23

申请人： SHIMADZU CORPORATION

发明人： Marui, Takao

IPC分类号： G01N23/203 ,  G01N23/201

CPC分类号： H01J49/446 ,  G01N23/20091 ,  G01N23/203 ,  G01N2223/053 ,  G01N2223/0568 ,  G01N2223/104

摘要： A time-of-flight (TOF) type ion scattering spectroscope (ISS) using a mixture of ions of different masses. Ions having a mass smaller than the smallest mass of the atoms in the sample surface can precisely discriminate light-weight object atoms of slightly different masses. Ions having an intermediate mass between heavy-weight atoms and light-weight atoms in the sample surface can precisely discriminate heavy-weight object atoms of slightly different masses.

摘要翻译： 使用不同质量的离子的混合物的飞行时间（TOF）型离子散射光谱仪（ISS）。 具有小于样品表面中原子的最小质量的质量的离子可以精确地区分稍微不同质量的轻质物体原子。 在样品表面的重质原子和轻质原子之间具有中间质量的离子可以精确地区分稍微不同质量的重量物体原子。

公开(公告)号：EP0499490B1

公开(公告)日：1996-06-12

申请号：EP92301263.7

申请日：1992-02-17

申请人： SHIMADZU CORPORATION

发明人： Marui, Takao

IPC分类号： H01J37/295 ,  H01J37/22 ,  H01J31/26 ,  H01J31/48

CPC分类号： H01J37/28 ,  H01J31/48 ,  H01J37/224 ,  H01J37/2955 ,  H01J2237/2445 ,  H01J2237/2544

公开(公告)号：EP0499490A2

公开(公告)日：1992-08-19

申请号：EP92301263.7

申请日：1992-02-17

申请人： SHIMADZU CORPORATION

发明人： Marui, Takao

IPC分类号： H01J37/295 ,  H01J37/22 ,  H01J31/26 ,  H01J31/48

CPC分类号： H01J37/28 ,  H01J31/48 ,  H01J37/224 ,  H01J37/2955 ,  H01J2237/2445 ,  H01J2237/2544

摘要： A scanning reflection electron diffraction microscope causes a primary electron beam (4) from its electron gun (2) to be reflectively diffracted from a sample (7) and a diffraction pattern to be formed on fluorescent screen (9). An optical lens (10) reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface (11), thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil (12) and a condenser coil (13), the image-carrying electron beam is detected by an electron-multiplier (15) such that a diffraction pattern is displayed on a cathode ray tube (19).

摘要翻译： 扫描反射电子衍射显微镜使来自电子枪（2）的一次电子束（4）从样品（7）反射衍射，并在荧光屏（9）上形成衍射图案。 光学透镜（10）减小了该衍射图案的尺寸并在光电表面（11）上形成了缩小的图像，从而产生了图像载体的电子束。 通过包括偏转线圈（12）和冷凝器线圈（13）的偏转系统偏转，由电子倍增器（15）检测图像携带电子束，使得衍射图案显示在阴极射线管（19）上 ）。