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公开(公告)号:EP2012347A4
公开(公告)日:2011-07-27
申请号:EP07742170
申请日:2007-04-23
申请人: SHINETSU HANDOTAI KK
IPC分类号: H01L21/02 , H01L21/322 , H01L27/12
CPC分类号: H01L21/76256 , H01L21/26506 , H01L21/26533 , H01L21/3226
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公开(公告)号:EP2012346A4
公开(公告)日:2010-09-29
申请号:EP07741675
申请日:2007-04-16
申请人: SHINETSU HANDOTAI KK
IPC分类号: H01L21/02 , H01L21/322 , H01L27/12
CPC分类号: H01L21/76256 , H01L21/26506
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3.SOI SUBSTRATE MANUFACTURING METHOD AND SOI SUBSTRATE 有权
标题翻译: SOI-SUBSTRAT上的SOI-SUBSTRATHERSTELLUNGSVERFAHREN公开(公告)号:EP2159825A4
公开(公告)日:2010-06-30
申请号:EP08738595
申请日:2008-04-15
申请人: SHINETSU HANDOTAI KK
发明人: MATSUMINE MASAO
CPC分类号: H01L21/76251 , H01L21/2007
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