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    PROCESS FOR PURIFYING OCTAFLUOROCYCLOBUTANE, PROCESS FOR PREPARING THE SAME, AND USE THEREOF
    2.
    发明公开
    PROCESS FOR PURIFYING OCTAFLUOROCYCLOBUTANE, PROCESS FOR PREPARING THE SAME, AND USE THEREOF 有权
    纯化八氟环丁烷的方法，其制备方法及其用途

    公开(公告)号：EP1307416A2

    公开(公告)日：2003-05-07

    申请号：EP02729558.3

    申请日：2002-01-11

    申请人： SHOWA DENKO K.K.

    发明人： HORIBA, Minako,c/o KAWASAKI PLANT,SHOWA DENKO KK ,  SUZUKI,Yasuhiro,c/o KAWASAKI PLANT,SHOWA DENKO KK

    IPC分类号： C07C17/395 ,  C07C17/389 ,  C07C17/269 ,  C07C23/06 ,  H01L21/3065 ,  C11D7/50

    CPC分类号： C07C23/06 ,  C07C17/269 ,  C07C17/389 ,  C07C17/395

    摘要： A process for purifying octafluorocyclobutane according to the present invention is characterized by contacting a crude octafluorocyclobutane containing impurities with an impurity decomposing agent under elevated temperature and then with an adsorbent to substantially remove the impurities from the crude octafluorocyclobutane. According to the purification process or preparation process of octafluorocyclobutane of the present invention, the impurities such as fluorocarbon can be substantially removed and a high-purity octafluorocyclobutane can be easily obtained. The octafluorocyclobutane obtained by the purification process of the present invention is substantially free of impurities and therefore, can be used as an etching or cleaning gas for use in the production process of a semiconductor device or the like.

    摘要翻译： 根据本发明的纯化八氟环丁烷的方法的特征在于使含杂质的粗八氟环丁烷与杂质分解剂在升高的温度下接触，然后与吸附剂接触以基本上从粗八氟环丁烷中除去杂质。 根据本发明的八氟环丁烷的纯化方法或制备方法，可以基本除去诸如氟碳的杂质，并且可以容易地获得高纯度的八氟环丁烷。 通过本发明的纯化方法获得的八氟环丁烷基本上不含杂质，因此可以用作用于半导体器件等的生产过程中的蚀刻或清洁气体。