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公开(公告)号:EP3105829A4
公开(公告)日:2017-08-09
申请号:EP15746370
申请日:2015-02-05
发明人: MCLAURIN MELVIN , SZTEIN ALEXANDER , HSU PO SHAN , GOUTAIN ERIC , STEIGERWALD DAN , RARING JAMES W
IPC分类号: H01S5/323 , H01L21/78 , H01S5/00 , H01S5/02 , H01S5/042 , H01S5/22 , H01S5/343 , H01S5/40 , H01S5/42
CPC分类号: H01S5/4087 , H01S5/005 , H01S5/0202 , H01S5/0203 , H01S5/0215 , H01S5/0216 , H01S5/0217 , H01S5/0218 , H01S5/0425 , H01S5/22 , H01S5/34333 , H01S5/4012 , H01S5/4031 , H01S5/4056 , H01S5/4093