专利检索 ap:("STAUFFER CHEMICAL COMPANY") AND inv:"Marsh, Wayne Edward" 第 1 页

1.

发明公开
Phospho-boro-silanol interlayer dielectric films and preparations 失效
标题翻译：磷光体 - 硅铝酸盐介质膜和制备

公开(公告)号：EP0202108A3

公开(公告)日：1988-06-15

申请号：EP86303627

申请日：1986-05-13

申请人： STAUFFER CHEMICAL COMPANY

发明人： Estes, William Edward , Marsh, Wayne Edward

IPC分类号： C08G77/56 , C08G77/48 , H01B03/00 , C09D03/82 , C08G77/00 , C08G77/30 , H01B03/46 , B32B27/28

CPC分类号： C08G77/56 , C08G77/48 , H01B3/46 , Y10T428/31663

摘要： There are disclosed certain categories of novel spin-coating compositions comprising phosphorus-doped and/or boron-doped silsesquioxane oligomers. Cured interlayer dielectric films prepared therefrom have a superior combination of defined properties, particularly including adhesion (of single-coat and multiple coats) and/or resistance against degradation at temperatures above 500°C. The spin-coating compositions are prepared in a critical manner from critical raw materials.