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公开(公告)号：EP4269949A2
公开(公告)日：2023-11-01
申请号：EP23162780.3
申请日：2023-03-20
发明人： HU, Yamu , SAHOO, Naren K , NALLAMOTHU, Pavan , FANG, Deyou , MCCLURE, David , GARBARINO, Marco
IPC分类号： G01C25/00
摘要： At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event that the sensed frequency of the residual mechanical oscillation is a spurious mode frequency and a quality factor of the residual mechanical oscillation is sufficient, an anti-phase signal is applied as the MEMS gyroscope drive signal in order to implement an active dampening of the residual mechanical oscillation. A kicking phase can then be performed to initiate oscillation. Also, in the event that the sensed frequency of the residual mechanical oscillation is a resonant mode frequency with sufficient drive energy, a quadrature phase signal with phase lock loop frequency control and amplitude controlled by the drive energy is applied as the MEMS gyroscope drive signal in order to induce controlled oscillation.
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公开(公告)号：EP4269949A3
公开(公告)日：2024-04-10
申请号：EP23162780.3
申请日：2023-03-20
发明人： HU, Yamu , SAHOO, Naren K , NALLAMOTHU, Pavan , FANG, Deyou , MCCLURE, David , GARBARINO, Marco
IPC分类号： G01C25/00
摘要： At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event that the sensed frequency of the residual mechanical oscillation is a spurious mode frequency and a quality factor of the residual mechanical oscillation is sufficient, an anti-phase signal is applied as the MEMS gyroscope drive signal in order to implement an active dampening of the residual mechanical oscillation. A kicking phase can then be performed to initiate oscillation. Also, in the event that the sensed frequency of the residual mechanical oscillation is a resonant mode frequency with sufficient drive energy, a quadrature phase signal with phase lock loop frequency control and amplitude controlled by the drive energy is applied as the MEMS gyroscope drive signal in order to induce controlled oscillation.
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