摘要:
Described herein is a reading circuit (30, 30') for a multi-axis gyroscope (52) provided with a microelectromechanical structure (10) having reference axes (x, y), along which angular velocities (Ω x , Ω y ) to be detected act, and detection elements (22a-22d), which are sensitive in respective detection directions (x 1 , x 2 ) and generate respective detection quantities as a function of projections of the angular velocities in the detection directions; the reading circuit generates electrical output signals (OUT), each correlated to a respective one of the angular velocities, as a function of the detection quantities. A combination stage (32, 32') combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination (Φ) of the detection directions with respect to the reference axes.
摘要:
A gyroscope includes a body (6), a driving mass (7), which is mobile according to a driving axis (X), and a sensing mass (8), which is driven by the driving mass (7) and is mobile according to a sensing axis (Y), in response to rotations of the body (6). A driving device (3) forms a microelectromechanical control loop (18) with the body (6) and the driving mass (7) and maintains the driving mass (7) in oscillation with a driving frequency (ω D ). The driving device (3) comprises a frequency detector (25), which supplies a clock signal (CK N ) at the frequency of oscillation of the driving mass (7), and a synchronization stage (29), which applies a calibrated phase shift (Δϕ) to the clock signal (CK N ) so as to compensate a phase shift caused by components (20, 21, 22) of the loop (18) that are set between the driving mass (7) and the control node (25a).