Reading circuit for a multi-axis MEMS gyroscope having detection directions inclined with respect to the reference axes, and corresponding multi-axis mems gyroscope
    6.
    发明公开
    Reading circuit for a multi-axis MEMS gyroscope having detection directions inclined with respect to the reference axes, and corresponding multi-axis mems gyroscope 有权
    阅读多轴MEMS陀螺仪的电路相对于倾斜的检测方向和相应的多轴MEMS陀螺仪的参考轴

    公开(公告)号:EP2236981A1

    公开(公告)日:2010-10-06

    申请号:EP09177154.3

    申请日:2009-11-26

    IPC分类号: G01C19/56

    CPC分类号: G01C19/56 G01C19/5712

    摘要: Described herein is a reading circuit (30, 30') for a multi-axis gyroscope (52) provided with a microelectromechanical structure (10) having reference axes (x, y), along which angular velocities (Ω x , Ω y ) to be detected act, and detection elements (22a-22d), which are sensitive in respective detection directions (x 1 , x 2 ) and generate respective detection quantities as a function of projections of the angular velocities in the detection directions; the reading circuit generates electrical output signals (OUT), each correlated to a respective one of the angular velocities, as a function of the detection quantities. A combination stage (32, 32') combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination (Φ) of the detection directions with respect to the reference axes.

    摘要翻译: 描述中的读取电路(30,30“),用于设置有微机电结构(10),其具有参考轴(x,y)的,沿着该角速度(©X©y)提供到一多轴陀螺仪(52) 被检测到的行为,和检测元件(22a至22d),其在respectivement检测方向敏感(X 1,X 2),并产生检测respectivement量作为检测方向的角速度的预测的功能; 读取电路基因率电输出信号(OUT),每个关联到respectivement角速度之一,作为检测量的函数。 组合级(32,32“)结合了电相对于彼此电气量与由检测元件来检测方向彼此不同的敏感产生的检测量,以便考虑到一个非零角度倾斜(| )相对于所述基准轴的检测方向的。

    Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
    10.
    发明公开
    Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope 有权
    微机电陀螺仪与校准致动同步和操作微机电陀螺仪的方法

    公开(公告)号:EP2360448A1

    公开(公告)日:2011-08-24

    申请号:EP11154596.8

    申请日:2011-02-15

    IPC分类号: G01C19/56

    摘要: A gyroscope includes a body (6), a driving mass (7), which is mobile according to a driving axis (X), and a sensing mass (8), which is driven by the driving mass (7) and is mobile according to a sensing axis (Y), in response to rotations of the body (6). A driving device (3) forms a microelectromechanical control loop (18) with the body (6) and the driving mass (7) and maintains the driving mass (7) in oscillation with a driving frequency (ω D ). The driving device (3) comprises a frequency detector (25), which supplies a clock signal (CK N ) at the frequency of oscillation of the driving mass (7), and a synchronization stage (29), which applies a calibrated phase shift (Δϕ) to the clock signal (CK N ) so as to compensate a phase shift caused by components (20, 21, 22) of the loop (18) that are set between the driving mass (7) and the control node (25a).

    摘要翻译: 陀螺仪包括一本体(6),驱动质量块(7),其是移动雅丁到驱动轴线(X),和感测质量块(8),其由驱动质量块(7)驱动并且是移动雅丁 到感测轴(Y),响应于所述主体的旋转(6)。 的驱动装置(3)形成微机电控制回路(18)与主体(6)和所述驱动质量块(7)和在振荡用的驱动频率(E D)保持驱动质量块(7)。 驱动装置(3)包括一个频率检测器(25),其在所述驱动质量块(7),和一个同步级(29)的振荡频率提供一个时钟信号(CK N)施加一校准的相移 (“O),以该时钟信号(CK N),以便补偿(18)没有被驱动质量块之间设定的回路(7)和所述控制结点的相移由部件引起的(20,21,22)( 25A)。