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1.发明授权Resonant micro-electro-mechanical system and gyroscope 有权Resonantes mikroelektromechanisches System und Gyroskop
公开(公告)号：EP1624285B1
公开(公告)日：2014-07-23
申请号：EP04425599.0
申请日：2004-08-03
IPC分类号： G01C19/56
CPC分类号： G01C19/5726
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公开(公告)号：EP1715580B1
公开(公告)日：2018-11-28
申请号：EP05425185.5
申请日：2005-03-31
IPC分类号： H03H9/02
CPC分类号： H03H9/02409 , G01C19/5726 , G01P15/097 , G01P15/125 , G01P2015/0814 , H03H2009/02496
摘要： A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure (2), having a first body (10) and a second body (11), which is capacitively coupled to the first body (10) and elastically oscillatable with respect thereto at a calibratable frequency of resonance (É R ) a relative displacement (”Y) between the second body (11) and the first body (10) being detectable from outside; and an amplifier (21) associated to the microstructure (2) for detecting the relative displacement (”Y). DC decoupling elements (23) are arranged between the amplifier (21) and the microstructure (2).
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公开(公告)号：EP1624286B1
公开(公告)日：2017-10-04
申请号：EP04425600.6
申请日：2004-08-03
IPC分类号： G01C19/5726
CPC分类号： G01C19/5726
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4.发明授权Microelectromechanical gyroscope with open loop reading device and control method of a microelectromechanical gyroscope 有权具有用于控制微机电陀螺仪的开环方法微机电陀螺仪检测装置
公开(公告)号：EP1962054B1
公开(公告)日：2011-07-20
申请号：EP07425075.4
申请日：2007-02-13
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5726 , G01C19/5762
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5.发明授权Method and circuit for detecting displacements using microelectromechanical sensors with compensation of parasitic capacitances 有权方法和电路，用于检测使用微机电传感器的位移与寄生电容的补偿
公开(公告)号：EP1278068B1
公开(公告)日：2010-04-21
申请号：EP02015859.8
申请日：2002-07-16
IPC分类号： G01P15/125 , G01P15/13 , G01D5/24 , G01R27/26
CPC分类号： G01D5/2417 , G01D3/066 , G01D5/24 , G01P15/125 , G01P15/131 , G01P2015/0814
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6.发明授权Detection circuit using a differential capacitive sensor with input-common-mode control in a sense interface 有权测量与输入共模范围的控制电路中的传感器接口，用于差动电容式传感器
公开(公告)号：EP1790988B1
公开(公告)日：2017-01-18
申请号：EP05425842.1
申请日：2005-11-29
IPC分类号： G01P15/13 , G01P15/125
CPC分类号： G01P15/125 , G01P15/131
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7.发明授权
公开(公告)号：EP1645847B1
公开(公告)日：2014-07-02
申请号：EP04425753.3
申请日：2004-10-08
IPC分类号： G01C19/56 , G01C19/5755 , G01P15/125 , G01P15/18 , G01P1/00 , H03H9/02 , H01L23/34 , B81B7/00 , B81B3/00
CPC分类号： B81C1/0069 , B81B3/0081 , B81B2201/025 , B81C1/00158 , B81C1/00666 , G01C19/56 , G01C19/5755 , G01P1/006 , G01P15/125 , G01P15/18 , G01P2015/0814 , H03H9/02448 , H03H2009/02496 , Y10T29/43
摘要： A micro-electromechanical device includes a semiconductor body (5), in which at least one first microstructure (2) and one second microstructure (3) of reference are integrated. The first microstructure (2) and the second microstructure (3) are arranged in the body (5) so as to undergo equal strains as a result of thermal expansions of said body (5; 105; 205; 305). Furthermore, the first microstructure (2) is provided with movable parts (6) and fixed parts (7) with respect to the body (5), and the second microstructure (3) has a shape that is substantially symmetrical to the first microstructure (2) and is fixed with respect to the body (5).
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8.发明授权Device and method for reading a capacitive sensor, in particular of a micro-electromechanical type 有权装置和方法，用于读取电容性传感器，尤其是微机电传感器
公开(公告)号：EP1793497B1
公开(公告)日：2011-04-27
申请号：EP05425863.7
申请日：2005-12-02
IPC分类号： H03K17/96 , G01P15/125
CPC分类号： G01P15/125
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