METHOD AND DEVICE FOR PRODUCING ABSOLUTE PRESSURE-TYPE PRESSURE SENSOR
    1.
    发明公开
    METHOD AND DEVICE FOR PRODUCING ABSOLUTE PRESSURE-TYPE PRESSURE SENSOR 审中-公开
    方法和设备用于生产绝对传感器

    公开(公告)号:EP1764598A4

    公开(公告)日:2007-12-05

    申请号:EP05751449

    申请日:2005-06-16

    发明人: TAKADA AKIRA

    IPC分类号: G01L9/00

    CPC分类号: G01L9/0051 G01L9/0055

    摘要: There is provided a method and device for producing an absolute pressure type pressure sensor that enables a relative pressure type pressure sensor to be modified (converted) into an absolute pressure type pressure sensor in a simple and easy manner. The method is characterized by comprising: a step of arranging a relative pressure type pressure sensor, that has a reference pressure chamber therein, and a pressure guide hole whose one end communicates with the reference pressure chamber and the other end opens to the atmosphere, inside a vacuum chamber with the other end of the pressure guide hole opening upward; a step of placing a solder piece onto the other end of the pressure guide hole; a step of drawing a vacuum inside the vacuum chamber; and a step of heating the solder piece until the solder melts.