公开(公告)号：EP4324956A1

公开(公告)日：2024-02-21

申请号：EP23189315.7

申请日：2023-08-02

申请人： Samsung Display Co., Ltd.

发明人： CHO, Youngsun ,  KO, Junhyeuk ,  KIM, Myungkyu ,  LEE, Young Kwang ,  JIN, Seung Min ,  HONG, Jae Min

IPC分类号： C23C14/04 ,  C23C14/24 ,  C23C14/50 ,  H10K50/00 ,  H10K71/16

摘要： A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.