公开(公告)号：EP4324956A1

公开(公告)日：2024-02-21

申请号：EP23189315.7

申请日：2023-08-02

申请人： Samsung Display Co., Ltd.

发明人： CHO, Youngsun ,  KO, Junhyeuk ,  KIM, Myungkyu ,  LEE, Young Kwang ,  JIN, Seung Min ,  HONG, Jae Min

IPC分类号： C23C14/04 ,  C23C14/24 ,  C23C14/50 ,  H10K50/00 ,  H10K71/16

摘要： A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.

公开(公告)号：EP4343017A3

公开(公告)日：2024-07-17

申请号：EP23195095.7

申请日：2023-09-04

申请人： Samsung Display Co., Ltd.

发明人： HONG, Kyongho ,  KIM, Myungkyu ,  PARK, Sungho ,  PARK, Chang-Kon ,  YOU, Sukbeom ,  LEE, Dongjae

IPC分类号： C23C14/04 ,  H01L21/027 ,  H01L21/308 ,  H10K71/16 ,  G03F1/00

CPC分类号： H10K71/166 ,  C23C14/042 ,  G03F1/00

摘要： A mask stage includes a stage inclined with respect to a vertical direction perpendicular to a plane defined by a first direction and a second direction intersecting each other, a plurality of first support units disposed between the stage and a mask frame disposed above the stage, and a plurality of second support units disposed on the stage and being adjacent toa lower side of the mask frame. The lower side of the mask frame extends in a first direction, and the second support units are respectively disposed under end portions of the lower side of the mask frame, which are opposite to each other in the first direction.

公开(公告)号：EP4343017A2

公开(公告)日：2024-03-27

申请号：EP23195095.7

申请日：2023-09-04

申请人： Samsung Display Co., Ltd.

发明人： HONG, Kyongho ,  KIM, Myungkyu ,  PARK, Sungho ,  PARK, Chang-Kon ,  YOU, Sukbeom ,  LEE, Dongjae

IPC分类号： C23C14/04 ,  H01L21/027 ,  H01L21/308 ,  H10K71/16

摘要： A mask stage includes a stage inclined with respect to a vertical direction perpendicular to a plane defined by a first direction and a second direction intersecting each other, a plurality of first support units disposed between the stage and a mask frame disposed above the stage, and a plurality of second support units disposed on the stage and being adjacent toa lower side of the mask frame. The lower side of the mask frame extends in a first direction, and the second support units are respectively disposed under end portions of the lower side of the mask frame, which are opposite to each other in the first direction.