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公开(公告)号:EP4365949A1
公开(公告)日:2024-05-08
申请号:EP23207187.8
申请日:2023-10-31
发明人: KIM, Gukhee , LEE, Kyoungwoo , NA, Sangcheol , GWAK, Minchan , KIM, Youngwoo , KIM, Hojun , LEE, Dongick
IPC分类号: H01L27/088 , H01L21/8234 , H01L21/768 , H01L23/48
CPC分类号: H01L27/0886 , H01L21/823431 , H01L21/823475 , H01L21/823481 , H01L21/823412 , H01L21/76898 , H01L23/481
摘要: An embodiment of the present inventive concept provides a semiconductor device, comprising: first and second fin-type active patterns disposed on an upper surface of a substrate, and having different widths; first and second gate structures crossing the first and second fin-type active patterns, respectively; first and second source/drain regions disposed on the first and second fin-type active patterns, respectively; first and second contact structures connected to the first and second source/drain regions, respectively; a gate isolation structure adj acent to the first fin-type active pattern having a relatively large width; a buried conductive structure contacting one end surface of the gate isolation structure, and connected to the second contact structure; a conductive through-structure extending from a lower surface of the substrate, and connected to the buried conductive structure; and a first wiring layer electrically connected to the first contact structure and the buried conductive structure.
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公开(公告)号:EP4386828A2
公开(公告)日:2024-06-19
申请号:EP23214666.2
申请日:2023-12-06
发明人: LEE, Kyoungwoo , LEE, Anthony Dongick , KIM, Kyungmin , KIM, Gukhee , KIM, Beomjin , KIM, Youngwoo , NA, Sangcheol , CHAE, Myeonggyoon , HA, Seungseok
IPC分类号: H01L23/00 , H01L23/48 , H01L23/528 , H01L23/58 , H01L23/60
CPC分类号: H01L23/562 , H01L23/585 , H01L23/481 , H01L23/5286 , H01L23/60
摘要: A semiconductor device includes a semiconductor substrate having a first surface and a second surface facing away from the first surface and including, in a plan view, a main chip region and a sealing region surrounding the main chip region, a front wiring layer on the first surface of the semiconductor substrate and including a front wiring structure, a back wiring layer on the second surface of the semiconductor substrate and including a power wiring structure, a front ring structure in the front wiring layer of the sealing region, and a back ring structure in the back wiring layer of the sealing region.
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公开(公告)号:EP4386828A3
公开(公告)日:2024-09-04
申请号:EP23214666.2
申请日:2023-12-06
发明人: LEE, Kyoungwoo , LEE, Anthony Dongick , KIM, Kyungmin , KIM, Gukhee , KIM, Beomjin , KIM, Youngwoo , NA, Sangcheol , CHAE, Myeonggyoon , HA, Seungseok
IPC分类号: H01L23/00 , H01L23/48 , H01L23/528 , H01L23/58 , H01L23/60
CPC分类号: H01L23/562 , H01L23/585 , H01L23/481 , H01L23/5286 , H01L23/60
摘要: A semiconductor device includes a semiconductor substrate having a first surface and a second surface facing away from the first surface and including, in a plan view, a main chip region and a sealing region surrounding the main chip region, a front wiring layer on the first surface of the semiconductor substrate and including a front wiring structure, a back wiring layer on the second surface of the semiconductor substrate and including a power wiring structure, a front ring structure in the front wiring layer of the sealing region, and a back ring structure in the back wiring layer of the sealing region.
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公开(公告)号:EP4333070A1
公开(公告)日:2024-03-06
申请号:EP23168561.1
申请日:2023-04-18
发明人: CHA, Seungmin , SONG, Seungmin , KIM, Youngwoo , KIM, Jinkyu , YOU, Sora , LEE, Namhyun , LEE, Sungmoon
IPC分类号: H01L29/06 , H01L23/528 , H01L29/423 , H01L21/336 , H01L29/775 , H01L21/768 , H01L21/8234 , H01L23/48 , B82Y10/00
摘要: An integrated circuit device includes a substrate, having a front surface and a rear surface opposite to each other, and a fin-type active region defined by a trench in the front surface, a device separation layer filling the trench, a source/drain region on the fin-type active region, a first conductive plug arranged on the source/drain region and electrically connected to the source/drain region, a power wiring line at least partially arranged on a lower surface of the substrate, a buried rail connected to the power wiring line through the device separation layer and decreasing in horizontal width toward the power wiring line, and a power via connecting the buried rail to the first conductive plug.
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