专利检索 ap:("SanDisk Corporation") AND inv:"LIU, Chao" 第 1 页

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发明授权
METHODS FOR FORMING NANOSTRUCTURE MONOLAYERS 有权
标题翻译： VERFAHREN ZUR BILDUNG VON NANOSTRUKTUR-MONOSCHICHTEN

公开(公告)号：EP2052407B1

公开(公告)日：2015-07-01

申请号：EP07797046.5

申请日：2007-07-27

申请人： SanDisk Corporation

发明人： NALLABOLU, Madhuri, L. , LIU, Chao , DUAN, Xiangfeng , CHEN, Jian , PARCE, J., Wallace , CRUDEN, Karen, Chu , RANGANATHAN, Srikanth

IPC分类号： H01L21/28 , H01L21/3105 , G03F7/075 , B82Y10/00 , B82Y30/00 , B82Y40/00

CPC分类号： H01L21/28008 , B82Y10/00 , B82Y30/00 , B82Y40/00 , H01L21/28229 , H01L21/28273 , H01L21/3105 , Y10S977/774 , Y10S977/782 , Y10S977/845 , Y10S977/855 , Y10S977/89 , Y10S977/891