公开(公告)号：EP1655820A3

公开(公告)日：2006-07-05

申请号：EP06001269.7

申请日：1996-10-18

申请人： Satcon Technology Corporation

发明人： Nichols, Stephen B. ,  Jagannathan, Shankar ,  Leary, Kevin ,  Eisenhaure, David ,  Stanton, William ,  Hockney, Richard ,  Downer, James ,  Gondhalekar, Vijay

IPC分类号： H02K7/08 ,  H02K7/09 ,  H02K17/12 ,  H02K19/10 ,  H02K19/18

CPC分类号： H01L21/68792 ,  F16C32/0448 ,  F16C32/047 ,  F16C32/0493 ,  F16C2380/26 ,  H02K7/09 ,  H02K17/12 ,  H02K21/44

摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber (12), for semiconductor wafer (14) processing. The stator assembly (16) has a permanent magnet or magnets (38) sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor (18) is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly (16) levitates and passively centres the rotor (18) along a vertical axis and against tilt about the either horizontal axis (26,28), provides a radial position bias for the rotor (18), and establishes a motor flux field at a the rotor poles (18c). Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor (18) as a synchronous homopolar motor. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor (18) and can actively damp oscillations that may overcome the passive centering.

摘要翻译： 旋转电机和旋转磁轴承集成在非接触式紧凑组件（10）中。 定子组件（16）围绕具有环形气隙（20）的铁磁转子（18），该环形气隙可容纳例如圆柱形壁（12e）。 的腔室（12），用于半导体晶片（14）的处理。 定子组件（16）具有夹在垂直隔开的磁性定子板（36）与多个磁极段（36a）之间的永磁体或磁体（38）。 转子（18）优选为具有互补极齿（18c）的磁性不锈钢环。 定子组件（16）使转子（18）沿垂直轴线浮动并被动地居中，并防止围绕任一水平轴线（26,28）倾斜，为转子（18）提供径向位置偏置，并建立电机磁通 在转子极点（18c）处。 缠绕在定子板（36）上的多相线圈（40）产生作为同步单极电机驱动转子（18）的旋转磁通场。 控制器（54）响应于感测到的转子（18）的物理位置而激励缠绕在每个定子极段（36a）上的控制线圈（42），并且可以主动地衰减可以克服被动对中的振荡。

公开(公告)号：EP1655820A2

公开(公告)日：2006-05-10

申请号：EP06001269.7

申请日：1996-10-18

申请人： Satcon Technology Corporation

发明人： Nichols, Stephen B. ,  Jagannathan, Shankar ,  Leary, Kevin ,  Eisenhaure, David ,  Stanton, William ,  Hockney, Richard ,  Downer, James ,  Gondhalekar, Vijay

IPC分类号： H02K7/08

CPC分类号： H01L21/68792 ,  F16C32/0448 ,  F16C32/047 ,  F16C32/0493 ,  F16C2380/26 ,  H02K7/09 ,  H02K17/12 ,  H02K21/44

摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber, for semiconductor wafer processing. The stator assembly (16) has a permanent magnet (38) or magnets sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly levitates and passively centres the rotor along a vertical axis and against tilt about the either horizontal axis (26, 28), provides a radial position bias for the rotor, and establishes a motor flux field at a the rotor poles. Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor. The control coils (42) provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.

摘要翻译： 旋转电动机和旋转磁性轴承集成在非接触的紧凑组件（10）中。 定子组件（16）围绕铁磁转子（18），环形气隙（20）可容纳圆柱形壁（12e） 的腔室（12），用于半导体晶片（14）处理。 定子组件（16）具有夹在具有多个极段（36a）的竖直间隔的磁性定子板（36）之间的永磁体或磁体（38）。 转子（18）优选为具有互补极齿（18c）的磁性不锈钢环。 定子组件（16）使转子（18）沿着垂直轴线悬浮并被动地居中并且围绕任一水平轴线（26,28）倾斜，为转子（18）提供径向位置偏置，并建立电动机通量 在转子极（18c）处。 缠绕在定子板（36）上的多相线圈（40）产生作为同步单极电动机驱动转子（18）的旋转磁通场。 响应于感测到的转子（18）的物理位置，控制器（54）激励缠绕在每个定子极段（36a）上的控制线圈（42），并且可以主动地抑制可以克服无源对中的振荡。