摘要:
A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber (12), for semiconductor wafer (14) processing. The stator assembly (16) has a permanent magnet or magnets (38) sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor (18) is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly (16) levitates and passively centres the rotor (18) along a vertical axis and against tilt about the either horizontal axis (26,28), provides a radial position bias for the rotor (18), and establishes a motor flux field at a the rotor poles (18c). Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor (18) as a synchronous homopolar motor. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor (18) and can actively damp oscillations that may overcome the passive centering.
摘要:
The invention provides a minitype single-phase generator with two poles. The generator has a rotor (1) and a stator. The rotor (1) core is provided with two sets of damp windings, each of which includes damp bars (3) and damp plates (4). The damp plates (4) are arranged on the opposite end faces of the core; the damp bars (3) are passing through the core in axial direction with the two ends of thereof connecting to the damp plates (4) reliably; Windings of the stator are equidistant-type two poles windings structure. There is included-angle, which is in the range of 3 to 15 between the slot (1a) of the rotor (1) core and inserting grooves of the stator core. The peripheral surface of the Stator core has axial grooves. The invention has many advantages such that output voltage is steady; the waveform is good particularly closer to sine wave; it has better flexibility for capacitive load; the using life can be longer, so the generator can be applied widely.
摘要:
A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber, for semiconductor wafer processing. The stator assembly (16) has a permanent magnet (38) or magnets sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly levitates and passively centers the rotor along a vertical axis and against tilt about the either horizontal axis (26, 28), provides a radial position bias for the rotor, and establishes a motor flux field at the rotor poles. Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor. The control coils (42) provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.
摘要:
Die Erfindung betrifft eine Elektrische Maschine (100) aufweisend ein feststehendes selbst- oder fremderregtes Sekundärteil (21), ein feststehendes Primärteil (22) mit einer Primärteilwicklung, einen drehbar gelagerten magnetischen Modulator (23), der eine magnetische Flussdichte moduliert, wobei der magnetische Modulator (23) zwischen Sekundärteil (21) und Primärteil (23) angeordnet ist oder das Primärteil (23) zwischen Sekundärteil (21) und magnetischem Modulator (23) angeordnet ist.
摘要:
An asymmetrical, electro-mechanical device (10) comprises a geometrically-magnetically-asymmetrical stator (12) and a rotor (22) which move with respect to each other. There is a stator air gap (20) which makes the stator (12) asymmetrical. The magnetic flux passing from the rotor (22) to the stator (12) is interrupted when the rotor (22) passes by the stator air gap (20). The invention is able to achieve improvements over the prior art electro-mechanical devices, particularly in respect of efficiency.