公开(公告)号：EP3315932A1

公开(公告)日：2018-05-02

申请号：EP17198875.1

申请日：2017-10-27

Applicant: Seiko Epson Corporation

Inventor： KAMIYA, Toshiyuki

IPC: G01L1/16

Abstract: A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and an inter-digital electrode placed on the second surface. Further, the second surface deforms when the first surface is subjected to the force. Furthermore, the second surface includes a part formed by a surface of a piezoelectric material and the inter-digital electrode is placed in the part. The piezoelectric material is quartz crystal. The second surface is parallel to an electrical axis of the quartz crystal.

Abstract translation: 本发明提供一种力检测传感器，该力检测传感器包括：基部构件，其具有受到外力的第一表面和具有与第一表面不同的法线方向的第二表面;以及位于第二表面上的数字间电极。 此外，当第一表面受到力时，第二表面变形。 此外，第二表面包括由压电材料的表面形成的部分，并且数字电极放置在该部分中。 压电材料是石英晶体。 第二表面平行于石英晶体的电轴。

公开(公告)号：EP2637006B1

公开(公告)日：2017-12-13

申请号：EP13158135.7

申请日：2013-03-07

Applicant: Seiko Epson Corporation

Inventor： KAWAI, Hiroki ,  KAMIYA, Toshiyuki ,  MATSUMOTO, Takanobu

IPC: G01L5/16 ,  B25J13/08 ,  G01L5/22 ,  G01L1/16

CPC classification number: G01L1/16 ,  B25J13/085 ,  G01L5/167 ,  G01L5/226

Abstract: A sensor module (10) includes a first member (12) including a first recess (30) in which a sensor element (42) including a piezoelectric element and an electrode is arranged, a second member (34) joined to the first member (12), a first plate (70) in contact with the second member (34), a second plate (80) in contact with the first member (12), and a fastening section (86) configured to fasten the first plate (70) and the second plate (80). A first projection (72) projecting toward the second member (34) is provided on the first plate (70). The internal height of the first recess (30) of the first member (12) is larger than the height of the sensor element (42). The sensor element (42) is in contact with the second member (34).

公开(公告)号：EP3327416B1

公开(公告)日：2019-07-31

申请号：EP17203041.3

申请日：2017-11-22

Applicant: Seiko Epson Corporation

Inventor： KAMIYA, Toshiyuki

IPC: G01L1/16

公开(公告)号：EP3315932B1

公开(公告)日：2020-01-01

申请号：EP17198875.1

申请日：2017-10-27

Applicant: Seiko Epson Corporation

Inventor： KAMIYA, Toshiyuki

IPC: G01L1/16 ,  H01L41/113 ,  H01L41/18 ,  G01L5/16

公开(公告)号：EP3327416A1

公开(公告)日：2018-05-30

申请号：EP17203041.3

申请日：2017-11-22

Applicant: Seiko Epson Corporation

Inventor： KAMIYA, Toshiyuki

IPC: G01L1/16

CPC classification number: B25J13/085 ,  G01G3/13 ,  G01G3/165 ,  G01L1/165 ,  G01L1/167 ,  G01L5/226 ,  H01L41/047

Abstract: A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.