公开(公告)号：EP2620747A2

公开(公告)日：2013-07-31

申请号：EP13165482.4

申请日：2003-03-12

申请人： Seiko Epson Corporation

发明人： Kikuchi, Takayuki

IPC分类号： G01C19/5607

CPC分类号： G01C19/5607

摘要： A vibrator (5) comprises a driving vibration piece (2A, 2B, 2C, 2D), a detection vibration piece (11A, 11B), and a base portion (4B) connecting the driving vibration piece (2A, 2B, 2C, 2D) and detection vibration piece (11A, 11B). The detection vibration piece (11A, 11B) is a bending vibration piece comprising a pair of surfaces (11c, 11d) substantially parallel with each other and a pair of side faces (11a, 11b). The detection vibration piece (11A, 11B) has a ratio WT/TT of a width WT to a thickness TT of not smaller than 0.3 and not larger than 0.8. The driving vibration piece (2A, 2B, 2C, 2D) and the detection vibration piece (11A, 11B) vibrate in bending vibration mode along a specified plane (XY), respectively, which is substantially parallel with the pair of parallel surfaces (11c, 11d).

摘要翻译： 振动器（5）包括驱动振动片（2A，2B，2C，2D），检测振动片（11A，11B）和连接驱动振动片（2A，2B，2C，2D）的基部 ）和检测振动片（11A，11B）。 检测振动片（11A，11B）是包括彼此大致平行的一对表面（11c，11d）和一对侧面（11a，11b）的弯曲振动片。 检测振动片（11A，11B）具有宽度WT与厚度TT之比不小于0.3且不大于0.8的WT / TT。 驱动振动片（2A，2B，2C，2D）和检测振动片（11A，11B）分别沿着与所述一对平行面（11c）大致平行的规定平面（XY）以弯曲振动模式振动 ，11d）。

公开(公告)号：EP1635140A3

公开(公告)日：2011-02-16

申请号：EP05018915.8

申请日：2005-08-31

申请人： Seiko Epson Corporation

发明人： Hayashi, Shigeki ,  Kikuchi, Takayuki ,  Kinoshita, Yusuke

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： It is provided a supporting structure having a substrate 12 and bonding wires 14A, 14B fixed onto the substrate 12 and connected to a vibrator 1. The substrate 12 has a pair of fixed portions 12a opposing each other and a pair of non-fixed portions 12b opposing each other. The fixed portions 12a and the non-fixed portions 12b together define a through hole 13A in the substrate 12. The vibrator 1 is supported with the bonding wire so that the vibrator 1 is not directly contacted with the substrate 12. The bonding wires 14A, 14B are fitted to the fixed portion 12a and is not fitted to any of the non-fixed portions 12b.

公开(公告)号：EP3715060A1

公开(公告)日：2020-09-30

申请号：EP20166305.1

申请日：2020-03-27

申请人： Seiko Epson Corporation

发明人： Kikuchi, Takayuki

IPC分类号： B25J9/04 ,  B25J9/08

摘要： A horizontal articulated robot includes a base, a first arm coupled to the base and configured to turn around a first axis, a second arm coupled to the first arm and configured to turn around a second axis parallel to the first axis, a third arm coupled to the second arm and configured to turn around a third axis parallel to the first axis and move along the third axis, a motor provided in the second arm and configured to drive the third arm, and a force detecting section provided between the motor and the second arm and configured to detect reaction generated by driving the motor.

公开(公告)号：EP2620747B1

公开(公告)日：2018-12-26

申请号：EP13165482.4

申请日：2003-03-12

申请人： Seiko Epson Corporation

发明人： Kikuchi, Takayuki

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

摘要： An object of the present invention is to reduce the zero point temperature drift of a vibrator and the deviation or change of the drift among vibrators actually fabricated. A vibrator has a driving vibration piece 2A, a detection vibration piece and a base portion connecting the driving and detection vibration pieces. The driving vibration piece 2A is composed of a bending vibration piece having a pair of surfaces 2c and 2d parallel with each other and a pair of side faces 2a and 2b. The driving vibration piece 2A has a ratio (WD/TD) of a width WD to a thickness TD of not smaller than 1.5 and not larger than 2.4.

公开(公告)号：EP1635140B1

公开(公告)日：2012-10-17

申请号：EP05018915.8

申请日：2005-08-31

申请人： Seiko Epson Corporation

发明人： Hayashi, Shigeki ,  Kikuchi, Takayuki ,  Kinoshita, Yusuke

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

公开(公告)号：EP1635139B1

公开(公告)日：2012-10-17

申请号：EP05018854.9

申请日：2005-08-30

申请人： Seiko Epson Corporation

发明人： Hayashi, Shigeki ,  Kikuchi, Takayuki ,  Kinoshita, Yusuke

IPC分类号： G01C19/56 ,  H03H9/09

CPC分类号： G01C19/5628 ,  G01C19/5621

公开(公告)号：EP1635139A2

公开(公告)日：2006-03-15

申请号：EP05018854.9

申请日：2005-08-30

申请人： NGK INSULATORS, LTD. ,  SEIKO EPSON CORPORATION

发明人： Hayashi, Shigeki ,  Kikuchi, Takayuki ,  Kinoshita, Yusuke

IPC分类号： G01C19/56

CPC分类号： G01C19/5628 ,  G01C19/5621

摘要： A structure for supporting a vibrator 1 is provided. The structure comprises a substrate 12 and bonding wires 14A, 14B fixed to the substrate 12 and connected with the vibrator 1. The vibrator 1 is supported with the bonding wires so that the vibratctr 1 is not directly contacted with the substrate 12. "fd" and "fw" satisfy the following formula (1). "fd" represents a resonance frequency of a driving vibration mode of the vibrator and "fw" represents a characteristic frequency of a vibration mode of the bonding wire at room temperature. (fd/2)×1.05 ≦ f w, or, fw ≦ (fd/2)×0.95

摘要翻译： 本发明提供一种用于支撑振动器1的结构。 该结构包括一个基板12和接合线14A，14B固定到基板12并与振动器1的振动器1连接支承与所述接合线所以没有vibratctr 1不直接与基板12“FD”接触 和“FW”满足下式（1）。 “FD” darstellt振动器的驱动振动模式和“FW” darstellt在室温下将接合线的振动模式的特征频率的共振频率。 FD / 2×1点05‰| FW，或者，FW‰| FD / 2×0.95

公开(公告)号：EP2620747A3

公开(公告)日：2014-07-02

申请号：EP13165482.4

申请日：2003-03-12

申请人： Seiko Epson Corporation

发明人： Kikuchi, Takayuki

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

摘要： A vibrator (5) comprises a driving vibration piece (2A, 2B, 2C, 2D), a detection vibration piece (11A, 11B), and a base portion (4B) connecting the driving vibration piece (2A, 2B, 2C, 2D) and detection vibration piece (11A, 11B). The detection vibration piece (11A, 11B) is a bending vibration piece comprising a pair of surfaces (11c, 11d) substantially parallel with each other and a pair of side faces (11a, 11b). The detection vibration piece (11A, 11B) has a ratio WT/TT of a width WT to a thickness TT of not smaller than 0.3 and not larger than 0.8. The driving vibration piece (2A, 2B, 2C, 2D) and the detection vibration piece (11A, 11B) vibrate in bending vibration mode along a specified plane (XY), respectively, which is substantially parallel with the pair of parallel surfaces (11c, 11d).

摘要翻译： 本发明的目的是减少振动器的零点温度漂移以及实际制造的振动器之间的漂移的偏差或变化。 振动器具有驱动振动片2A，检测振动片和连接驱动和检测振动片的基部。 驱动振动片2A由具有彼此平行的一对表面2c和2d的弯曲振动片以及一对侧面2a和2b组成。 驱动振动片2A的宽度WD与厚度TD的比（WD / TD）不小于1.5且不大于2.4。

公开(公告)号：EP2690400A2

公开(公告)日：2014-01-29

申请号：EP13177198.2

申请日：2013-07-19

申请人： Seiko Epson Corporation

发明人： Yamaguchi, Keiichi ,  Ogura, Seiichiro ,  Kikuchi, Takayuki ,  Nishizawa, Ryuta ,  Osawa, Seiji

IPC分类号： G01C19/5621

CPC分类号： G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

摘要： A vibrator element (2) includes a pair of first and second drive vibrating arms (441, 442; 443, 444) that extend in opposite directions from a base portion (41, 431, 432) ; a first weight (12a ... 12s) that is spaced from a tip of at least one of the first and second drive vibrating arms (441 ... 444) toward the base portion (41, 431, 432) and is provided in a first region of the at least one of the drive vibrating arms (441 ... 444); and a second weight (11a ... 11s) that is provided in a second region that is a region between a tip of the first weight (12a ... 12s) and the tip of the at least one of the drive vibrating arms (441 ... 444) . When an area of the first region is represented as A1, a mass of the first weight (12a ... 12s) is represented as B1, an area of the second region is represented as A2, and a mass of the second weight (11a ... 11s) is represented as B2, B1/A1 > B2/A2 is established.

摘要翻译： 振动器元件（2）包括一对第一和第二驱动振动臂（441,442; 443，444）并从底座部分（41，431，432）在相反的方向延伸; 第一权重（12 ... 12秒）并从所述第一和第二驱动振动臂中的至少一个（441 ... 444）的朝向所述基部的顶端间隔开的（41，431，432），并在被提供 驱动用振动臂（441 ... 444）中的所述至少一个的第一区域; 和第二配重（11 ... 11秒）并在第二区域中设置并在所述第一配重（12 ... 12秒）的前端和驱动振动臂的至少一个的尖端（之间的区域 441 ... 444）。 当在第一区域的面积被表示为A1，所述第一权重的质量（12 ... 12秒）被表示为B1，（在第二区域的面积被表示为A2，并且所述第二权重11a的质量 ... 11S）被表示为B2，B1 / A1> B2 / A2被建立。

公开(公告)号：EP2447672A2

公开(公告)日：2012-05-02

申请号：EP12151093.7

申请日：2004-10-28

申请人： Seiko Epson Corporation

发明人： Ishikawa, Seiji ,  Kikuchi, Takayuki ,  Hayashi, Shigeki

IPC分类号： G01C19/5607

CPC分类号： G01C19/5621 ,  G01C19/5628 ,  G01C19/5783

摘要： The present invention provides, in a physical quantity measuring system using a vibrator, a supporting structure of a vibrator for reducing the zero-point temperature drift of detection signal. It is provided a supporting member for supporting a vibrator with a bonding wire.
The supporting member comprises a supporting plate with an opening formed therein to be positioned direct under a vibrator; and a bonding wire 31, 32 comprising an end portion 29 to be bonded with said vibrator, a fixed portion 31a, 32a fixed on said supporting plate, a leg portion 31b, 32b extending from said end portion and a curved portion 31d, 32d provided between said leg portion and fixed portion.

摘要翻译： 本发明在使用振动器的物理量测量系统中提供振动器的支撑结构，用于降低检测信号的零点温度漂移。 设置有用于用接合线支撑振动器的支撑构件。 支撑构件包括其中形成有开口的支撑板直接定位在振动器下方; 以及接合线31,32，包括要与所述振动器接合的端部29，固定在所述支撑板上的固定部分31a，32a，从所述端部延伸的腿部31b，32b以及弯曲部分31d，32d 在所述腿部和固定部之间。