公开(公告)号：EP2592382A1

公开(公告)日：2013-05-15

申请号：EP11803398.4

申请日：2011-05-25

申请人： Hitachi Automotive Systems, Ltd.

发明人： JEONG Heewon ,  DEGAWA Munenori ,  HAYASHI Masahide

IPC分类号： G01C19/56

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of a high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two dead weights (2, 3); means (C1, C2, C3, C4, +vd, -vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明旨在提供一种即使在存在振动干扰的环境下也能够保持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个自重（2,3）; 用于在反相位置移动两个静重的装置（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于检测电容变化时两个静负载的位移; 和用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个自重（2,3）以反相位置移位的情况下，其间具有增加的静电电容的一组电极（例如C5和C8）电连接 以及在上述情况下其间的静电电容减小的一组电极（例如，C6和C7）彼此电连接，并且这些组电极连接到C / V转换 单元（53）。

公开(公告)号：EP2577324A1

公开(公告)日：2013-04-10

申请号：EP11727728.5

申请日：2011-05-26

申请人： Cambridge Enterprise Ltd.

发明人： THIRUVENKATANATHAN, Pradyumna ,  SESHIA, Ashwin ,  YAN, Jize

IPC分类号： G01P15/097 ,  G01C19/56

CPC分类号： G01P9/04 ,  G01C19/5726 ,  G01C19/5755 ,  G01P15/097 ,  G01P15/18 ,  G01P2015/0814

摘要： The invention comprises an inertia! sensor comprising a frame, a proof mass; a first resonant element having a proximal end and a distal end, the first resonant element being fixed to the frame at its proximal end and coupled to the proof mass at its distal end, a second resonant element having a proximal end and a distal end, the second resonant element being fixed to the frame at its proximal end, adjacent to the first resonant element such that there is no coupling between the second resonant element and the proof mass, a means for coupling the first resonant element to the second resonant element; a drive means coupled to the first and second resonant elements for vibrating the first and second resonant elements; and a sensor assembly for detecting the amplitude of vibration of the resonant elements.

公开(公告)号：EP2690400A3

公开(公告)日：2016-08-10

申请号：EP13177198.2

申请日：2013-07-19

申请人： Seiko Epson Corporation

发明人： Yamaguchi, Keiichi ,  Ogura, Seiichiro ,  Kikuchi, Takayuki ,  Nishizawa, Ryuta ,  Osawa, Seiji

IPC分类号： G01C19/5621 ,  G01C19/5628

CPC分类号： G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

摘要： A vibrator element (2) includes a pair of first and second drive vibrating arms (441, 442; 443, 444) that extend in opposite directions from a base portion (41, 431, 432) ; a first weight (12a ... 12s) that is spaced from a tip of at least one of the first and second drive vibrating arms (441 ... 444) toward the base portion (41, 431, 432) and is provided in a first region of the at least one of the drive vibrating arms (441 ... 444); and a second weight (11a ... 11s) that is provided in a second region that is a region between a tip of the first weight (12a ... 12s) and the tip of the at least one of the drive vibrating arms (441 ... 444) . When an area of the first region is represented as A1, a mass of the first weight (12a ... 12s) is represented as B1, an area of the second region is represented as A2, and a mass of the second weight (11a ... 11s) is represented as B2, B1/A1 > B2/A2 is established.

公开(公告)号：EP2592382A4

公开(公告)日：2016-04-06

申请号：EP11803398

申请日：2011-05-25

申请人： HITACHI AUTOMOTIVE SYSTEMS LTD

发明人： JEONG HEEWON ,  DEGAWA MUNENORI ,  HAYASHI MASAHIDE

IPC分类号： G01C19/574

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of a high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two dead weights (2, 3); means (C1, C2, C3, C4, +vd, -vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

公开(公告)号：EP2577324B1

公开(公告)日：2014-12-03

申请号：EP11727728.5

申请日：2011-05-26

申请人： Cambridge Enterprise Ltd.

发明人： THIRUVENKATANATHAN, Pradyumna ,  SESHIA, Ashwin ,  YAN, Jize

IPC分类号： G01C19/5755 ,  G01C19/5726 ,  G01P15/097 ,  G01P15/18

CPC分类号： G01P9/04 ,  G01C19/5726 ,  G01C19/5755 ,  G01P15/097 ,  G01P15/18 ,  G01P2015/0814

摘要： The invention comprises an inertia! sensor comprising a frame, a proof mass; a first resonant element having a proximal end and a distal end, the first resonant element being fixed to the frame at its proximal end and coupled to the proof mass at its distal end, a second resonant element having a proximal end and a distal end, the second resonant element being fixed to the frame at its proximal end, adjacent to the first resonant element such that there is no coupling between the second resonant element and the proof mass, a means for coupling the first resonant element to the second resonant element; a drive means coupled to the first and second resonant elements for vibrating the first and second resonant elements; and a sensor assembly for detecting the amplitude of vibration of the resonant elements.

公开(公告)号：EP2690400A2

公开(公告)日：2014-01-29

申请号：EP13177198.2

申请日：2013-07-19

申请人： Seiko Epson Corporation

发明人： Yamaguchi, Keiichi ,  Ogura, Seiichiro ,  Kikuchi, Takayuki ,  Nishizawa, Ryuta ,  Osawa, Seiji

IPC分类号： G01C19/5621

CPC分类号： G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

摘要： A vibrator element (2) includes a pair of first and second drive vibrating arms (441, 442; 443, 444) that extend in opposite directions from a base portion (41, 431, 432) ; a first weight (12a ... 12s) that is spaced from a tip of at least one of the first and second drive vibrating arms (441 ... 444) toward the base portion (41, 431, 432) and is provided in a first region of the at least one of the drive vibrating arms (441 ... 444); and a second weight (11a ... 11s) that is provided in a second region that is a region between a tip of the first weight (12a ... 12s) and the tip of the at least one of the drive vibrating arms (441 ... 444) . When an area of the first region is represented as A1, a mass of the first weight (12a ... 12s) is represented as B1, an area of the second region is represented as A2, and a mass of the second weight (11a ... 11s) is represented as B2, B1/A1 > B2/A2 is established.

摘要翻译： 振动器元件（2）包括一对第一和第二驱动振动臂（441,442; 443，444）并从底座部分（41，431，432）在相反的方向延伸; 第一权重（12 ... 12秒）并从所述第一和第二驱动振动臂中的至少一个（441 ... 444）的朝向所述基部的顶端间隔开的（41，431，432），并在被提供 驱动用振动臂（441 ... 444）中的所述至少一个的第一区域; 和第二配重（11 ... 11秒）并在第二区域中设置并在所述第一配重（12 ... 12秒）的前端和驱动振动臂的至少一个的尖端（之间的区域 441 ... 444）。 当在第一区域的面积被表示为A1，所述第一权重的质量（12 ... 12秒）被表示为B1，（在第二区域的面积被表示为A2，并且所述第二权重11a的质量 ... 11S）被表示为B2，B1 / A1> B2 / A2被建立。

公开(公告)号：EP2648334A1

公开(公告)日：2013-10-09

申请号：EP13001721.3

申请日：2013-04-04

申请人： Fairchild Semiconductor Corporation

发明人： Opris, Ion ,  Tao, Hai ,  Lee, Shungneng

IPC分类号： H03F3/70 ,  H03F1/34 ,  H03F3/45 ,  G01C19/5726

CPC分类号： H03F1/00 ,  G01C19/5776 ,  G01P9/04 ,  H02N1/00 ,  H03F1/34 ,  H03F3/45475 ,  H03F3/70 ,  H03F2200/294

摘要： This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to the MEMS device and to provide sense information of a proof mass of the MEMS device, a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier, and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency.

摘要翻译： 本文件尤其讨论了前端电荷放大器的装置和方法。 在某些示例中，用于微机电系统（MEMS）器件的前端电荷放大器可以包括配置成耦合到MEMS器件并且提供MEMS器件的校验质量的感测信息的电荷放大器，被配置为接收 所述感测信息并且向所述电荷放大器的输入提供反馈，并且其中所述电荷放大器包括传递函数，所述传递函数具有在第一频率的第一极点，在第二频率具有第二极点，在第三频率处具有一个零点的传递函数。