公开(公告)号：EP3362799A1

公开(公告)日：2018-08-22

申请号：EP15906190.2

申请日：2015-10-13

申请人： Sensapex Oy

发明人： VÄHÄSÖYRINKI, Mikko ,  VIMPARI, Markku

IPC分类号： G01Q20/00 ,  B82Y35/00 ,  B25J7/00 ,  G02B21/32 ,  B81B3/00

CPC分类号： B25J7/00 ,  B25J13/02 ,  B81B3/00 ,  G01N33/48707 ,  G01N33/48728 ,  G01Q10/06 ,  G01Q30/14 ,  G01Q60/44 ,  G01Q70/06 ,  G02B21/32

摘要： The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).