公开(公告)号：EP3362798A1

公开(公告)日：2018-08-22

申请号：EP15906189.4

申请日：2015-10-13

申请人： Sensapex Oy

发明人： VÄHÄSÖYRINKI, Mikko

IPC分类号： G01Q20/00 ,  B25J7/00 ,  G01Q10/06 ,  B82Y35/00 ,  B81B3/00

CPC分类号： B25J7/00 ,  B25J13/085 ,  B25J13/087 ,  B25J19/023 ,  B81B3/00 ,  G01N33/48728 ,  G01Q10/06 ,  G01Q10/065 ,  G01Q30/14 ,  G01Q60/44 ,  G01Q70/06

摘要： The invention relates to a measurement device (120), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a sensor (150) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the having an input coupled to the sensor (150) for receiving a sensor signal from the sensor (150) to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the sensor signal. The measurement device (120) may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said sensor signal and said positioning control instructions (300).

公开(公告)号：EP2496388A1

公开(公告)日：2012-09-12

申请号：EP09851052.2

申请日：2009-11-06

申请人： Sensapex Oy

发明人： VÄHÄSÖYRINKI, Mikko ,  LEMPEÄ, Mikko

IPC分类号： B25J7/00

CPC分类号： B25J7/00 ,  G02B21/32 ,  H02N2/025

摘要： A compact micromanipulator system has a micromanipulator element that cause movement of a tool attached to the micromanipulator element. The micromanipulator element is attached to a support structure, which in turn is attached to a sliding base in a hinged manner to allow sliding and/or tipping of the micromanipulator element away from the normal operating position of the micromanipulator element.

公开(公告)号：EP2776215B1

公开(公告)日：2018-11-28

申请号：EP12848073.8

申请日：2012-11-06

申请人： Sensapex Oy

发明人： VÄHÄSÖYRINKI, Mikko

IPC分类号： B25J7/00 ,  G02B21/32 ,  B25J19/00

CPC分类号： B25J7/00 ,  B25J19/0016 ,  G02B21/32 ,  H02N2/02 ,  H02N2/025

摘要： The aspects of the disclosed embodiments relate to a micromanipulator arrangement that includes at least one drive stem, at least one movable element arranged on the drive stem to move along the drive stem wherein the drive stem being arranged to cause a change in a position of the movable element with respect to the drive stem; wherein an additional factor exists having an effect in the change of the position of the movable element and the micromanipulator arrangement further comprises means for compensating said additional factor such that said effect is diminished.

公开(公告)号：EP3362799A1

公开(公告)日：2018-08-22

申请号：EP15906190.2

申请日：2015-10-13

申请人： Sensapex Oy

发明人： VÄHÄSÖYRINKI, Mikko ,  VIMPARI, Markku

IPC分类号： G01Q20/00 ,  B82Y35/00 ,  B25J7/00 ,  G02B21/32 ,  B81B3/00

CPC分类号： B25J7/00 ,  B25J13/02 ,  B81B3/00 ,  G01N33/48707 ,  G01N33/48728 ,  G01Q10/06 ,  G01Q30/14 ,  G01Q60/44 ,  G01Q70/06 ,  G02B21/32

摘要： The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).

公开(公告)号：EP2776215A1

公开(公告)日：2014-09-17

申请号：EP12848073.8

申请日：2012-11-06

申请人： Sensapex Oy

发明人： VÄHÄSÖYRINKI, Mikko

IPC分类号： B25J7/00 ,  G02B21/32

CPC分类号： B25J7/00 ,  B25J19/0016 ,  G02B21/32 ,  H02N2/02 ,  H02N2/025

摘要： The invention relates to a micromanipulator arrangement comprising at least one drive stem (120, 821), at least one movable element (130, 320, 360) arranged on the drive stem (120, 821) to move along the drive stem (120, 821 ) wherein the drive stem (120, 821) being arranged to cause a change in a position of the movable element (130, 320, 360) with respect to the drive stem (120, 821); wherein an additional factor exists having an effect in the change of the position of the movable element and the micromanipulator arrangement further comprises means (870) for compensating said additional factor such that said effect is diminished.