Seed layer processes for MOCVD of ferroelectric thin films on high-K gate oxides
    7.
    发明公开
    Seed layer processes for MOCVD of ferroelectric thin films on high-K gate oxides 审中-公开
    MOCVD方法在栅极氧化物形成晶种层用于生产ferroelekrischer层高Dielektizitätkonstanten

    公开(公告)号:EP1643000A1

    公开(公告)日:2006-04-05

    申请号:EP06000295.3

    申请日:2002-11-07

    IPC分类号: C23C16/00 H01L21/28

    摘要: A method of forming a ferroelectric thin film on a high-k layer includes preparing a silicon substrate; forming a high-k layer on the substrate; depositing a seed layer of ferroelectric material at a relatively high temperature on the high-k layer; depositing a top layer of ferroelectric material on the seed layer at a relatively low temperature; and annealing the substrate, the high-k layer and the ferroelectric layers to form a ferroelectric thin film.

    摘要翻译: 形成的高k层上的铁电薄膜的方法包括:制备硅衬底; 形成在衬底上的高k层; 在高k层上的相对高的温度淀积铁电材料的籽晶层; 沉积在相对低的温度下的晶种层上的铁电材料的顶层; 和退火该基底,该高k层和强电介质层,以形成铁电薄膜。

    Using lightly doped resistor for output stage electrostatic discharge protection
    9.
    发明公开
    Using lightly doped resistor for output stage electrostatic discharge protection 审中-公开
    针对功率放大器的静电放电保护使用leichtdotiertem电阻的

    公开(公告)号:EP1150353A3

    公开(公告)日:2005-09-21

    申请号:EP01303801.3

    申请日:2001-04-26

    发明人: Hsu, Sheng Teng

    IPC分类号: H01L27/02 H01L21/8238

    CPC分类号: H01L21/823807 H01L27/0288

    摘要: A method of fabricating a CMOS device having improved electrostatic discharge protection properties includes preparing a silicon substrate; forming an n-well for a pMOS active region; forming a p-well for an nMOS active region; and implanting ions to form a lightly doped drain series resistor in at least on of the active regions. An electrostatic discharge protection structure for use in a CMOS device having a pMOST and an nMOST therein includes an electrostatic triggering structure to uniformly trigger both pMOST and nMOST output to protect against positive and negative electrostatic discharge events.

    1R1D R-ram array with floating P-well
    10.
    发明公开
    1R1D R-ram array with floating P-well 有权
    1R1D R-RAM-Zellenfeld mit schwebender P-Wanne

    公开(公告)号:EP1469519A2

    公开(公告)日:2004-10-20

    申请号:EP04250897.8

    申请日:2004-02-19

    IPC分类号: H01L27/10

    摘要: A low-capacitance one-resistor/one-diode (1R1D) R-RAM array with a floating p-well is provided. The fabrication method comprises: forming an integrated circuit (IC) substrate (202); forming an n-doped buried layer (buried n layer) (204) of silicon overlying the substrate; forming n-doped silicon sidewalls (210) overlying the buried n layer; forming a p-doped well of silicon (p-well) (206) overlying the buried n layer; and, forming a 1R1D R-RAM array (208) overlying the p-well. Typically, the combination of the buried n layer and the n-doped sidewalls form an n-doped well (n-well) of silicon. Then, the p-well is formed inside the n-well. In other aspects, the p-well has sidewalls (212), and the method further comprises: forming an oxide insulator (214) overlying the p-well sidewalls, between the n-well and the R-RAM array.

    摘要翻译: 提供具有浮动p-well的低电容单电阻/单二极管(1R1D)R-RAM阵列。 该制造方法包括:形成集成电路(IC)衬底(202); 形成覆盖在衬底上的硅的n掺杂掩埋层(掩埋n层)(204); 形成覆盖所述掩埋n层的n掺杂硅侧壁(210); 形成覆盖在掩埋n层上的硅(p阱)(206)的p掺杂阱; 并且形成覆盖p阱的1R1D R-RAM阵列(208)。 通常,掩埋n层和n掺杂侧壁的组合形成硅的n掺杂阱(n阱)。 然后,p阱形成在n阱内。 在其它方面,p阱具有侧壁(212),并且该方法还包括:形成覆盖p阱侧壁,n阱和R-RAM阵列之间的氧化物绝缘体(214)。