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公开(公告)号:EP3919192A1
公开(公告)日:2021-12-08
申请号:EP21173912.3
申请日:2021-05-14
摘要: A cleaning apparatus capable of thoroughly cleaning all parts of a workpiece is provided. The cleaning apparatus (10) includes: a cleaning chamber (11); a table rotation shaft (25) that rotates about a first axis (3); a first swivel fitting (31) disposed inside the table rotation shaft (25); a table (37) on which the cleaning workpiece (42) is placed; a first motor (15) that rotates the table rotation shaft (25); a propeller shaft (63) that rotates about a second axis (7) that is parallel to the first axis (3); a second swivel fitting (65) connected to a propeller shaft (63); and a nozzle (69) that rotates integrally with the second swivel shaft (65b) and that ejects a cleaning fluid (9) in a direction different from the second axis (7) toward the cleaning workpiece (42).