摘要:
Disclosed herein is a diamond synthesizing method comprising the steps of introducing a mixed gas of hydrocarbon gas and hydrogen gas into a reaction vessel (9) which is maintained under a pressure of 1 to 100 Torr and causing dc discharge across a cathode (1) and an anode (2), thereby depositing diamond on a substrate (3) which is placed on the cathode (2). A positive column of Ha > CH is produced with a high formation rate of atomic hydrogen for promoting decomposition of the hydrocarbon gas, and concentration of hydrocarbon is reduced while maintaining the condition. According to this method, it is possible to synthesize high-quality diamond, which hardly contains non-diamond carbon components such as amorphous carbon and graphite, at a film forming rate of about 1 µm/h.
摘要:
A method of working aluminum nitride ceramics is adapted to enable accurate cutting and smoothing of a surface of an aluminum nitride ceramics workpiece and to improve the working speed without exerting a bad influence on the material of the aluminum nitride ceramics workpiece itself. A surface of an aluminum nitride ceramics workpiece (5) is irradiated with light (2) having a wavelength which is in the range of 190 nm and not more than 360 nm, and worked. Proper working can be performed by defining the energy density of the light as applied, the divergence angle of a beam and the half-width of the spectrum in prescribed ranges. A laser beam (2) is converged by cylindrical lenses (3, 4) or cylindrical mirrors. It is possible to widen the range of application of aluminum nitride ceramics to the field of structural members, which have generally been hard to work with requirement for high costs.
摘要:
Diamond (3) is subjected to working such as smoothing or cutting by irradiation of light having a wavelength in the range of 190 nm to 360 nm to the surface of the diamond (3). The energy density of the incident light, the divergent angle of the light beam and the half-width of spectrum of the light are specified. The light beam is converged by a cylindrical lens (2). Moreover, the working is conducted in a specified material, whereby the flatness of the worked face and the working speed are improved.
摘要:
Diamond (3) is subjected to working such as smoothing or cutting by irradiation of light having a wavelength in the range of 190 nm to 360 nm to the surface of the diamond (3). The energy density of the incident light, the divergent angle of the light beam and the half-width of spectrum of the light are specified. The light beam is converged by a cylindrical lens (2). Moreover, the working is conducted in a specified material, whereby the flatness of the worked face and the working speed are improved.
摘要:
A gas sensor including a porous plate-like sintered body (2) comprising trisilicon tetranitride needle crystals; one or two first catalyst metal thin films (5a,5b) and one second catalyst metal thin film (8), formed on one surface of the plate-like sintered body (2) in a non-contacted state with each other; oxygen ion-conductive solid electrolyte thin films (6a,6b,6c) formed on the respective surface; a surface layer thin film (7a,7b,7c) formed on the respective surfaces, so that a first measurement part (3a), a second measurement part (3b) and a third measurement part (4) are constituted; and a glass sealing layer (9) comprising silicon oxide, formed on other surface of the porous plate-like sintered body (2), a surface other than the surface of the porous plate-like sintered body having the first catalyst metal thin film and the second catalyst metal thin film formed thereon, and a side of the first measurement part and the second measurement part.
摘要:
There is provided a method to cut or smooth an article containing cubic boron nitride comprising irradiating a beam having a wavelength of not longer than 360 nm to the article so that the article is cut or smoothed fast with high accuracy.