Method of working aluminum nitride ceramics
    5.
    发明公开
    Method of working aluminum nitride ceramics 失效
    Verfahren zum Bearbeiten von aluminiumnitrid Keramiken。

    公开(公告)号:EP0669297A1

    公开(公告)日:1995-08-30

    申请号:EP95102441.3

    申请日:1995-02-21

    IPC分类号: C04B41/00 B28D1/22

    CPC分类号: C04B41/0036 B28D1/221

    摘要: A method of working aluminum nitride ceramics is adapted to enable accurate cutting and smoothing of a surface of an aluminum nitride ceramics workpiece and to improve the working speed without exerting a bad influence on the material of the aluminum nitride ceramics workpiece itself. A surface of an aluminum nitride ceramics workpiece (5) is irradiated with light (2) having a wavelength which is in the range of 190 nm and not more than 360 nm, and worked. Proper working can be performed by defining the energy density of the light as applied, the divergence angle of a beam and the half-width of the spectrum in prescribed ranges. A laser beam (2) is converged by cylindrical lenses (3, 4) or cylindrical mirrors. It is possible to widen the range of application of aluminum nitride ceramics to the field of structural members, which have generally been hard to work with requirement for high costs.

    摘要翻译: 一种加工氮化铝陶瓷的方法适用于对氮化铝陶瓷工件的表面进行精确的切割和平滑化,并提高工作速度,而不会对氮化铝陶瓷工件本身的材料产生不良影响。 用波长在190nm以上且360nm以下的光(2)照射氮化铝陶瓷工件(5)的表面,进行加工。 可以通过定义施加的光的能量密度,光束的发散角和规定范围内的光谱的半宽度来进行适当的工作。 激光束(2)由柱面透镜(3,4)或圆柱形镜子会聚。 可以将氮化铝陶瓷的应用范围扩大到结构构件领域,这通常难以用于高成本的要求。