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1.发明授权Laser oscillating apparatus, exposure apparatus using the same, and device fabrication method 有权激光装置中，使用相同的制造方法的曝光装置
公开(公告)号：EP1026796B1
公开(公告)日：2005-11-16
申请号：EP00300719.2
申请日：2000-01-31
发明人： Ohmi, Tadahiro , Suzuki, Nobumasa, c/o Canon Kabushiki Kaisha , Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha , Hirayama, Masaki, c/o Canon Kabushiki Kaisha , Ohsawa, Hiroshi, c/o Canon Kabushiki Kaisha , Shinohara, Toshikuni, c/o Canon Kabushiki Kaisha
IPC分类号： H01S3/0973 , H01S3/225 , H01S3/03 , H01L21/027 , G03F7/20
CPC分类号： G03F7/70025 , H01S3/0315 , H01S3/0385 , H01S3/225
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公开(公告)号：EP1032098B1
公开(公告)日：2004-06-09
申请号：EP00301521.1
申请日：2000-02-25
发明人： Ohmi, Tadahiro , Suzuki, Nobumasa, c/o Canon Kabushiki Kaisha , Shinohara, Toshikuni , Ohsawa, Hiroshi, c/o Canon Kabushiki Kaisha , Hirayama, Masaki , Tanaka, Nobuyoshi c/o Canon Kabushiki Kaisha
IPC分类号： H01S3/0973 , H01S3/03 , H01S3/225 , H01L21/027 , G03F7/20
CPC分类号： H01S3/0315 , G03F7/70383 , H01S3/0385 , H01S3/0975 , H01S3/225
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公开(公告)号：EP1032098A2
公开(公告)日：2000-08-30
申请号：EP00301521.1
申请日：2000-02-25
发明人： Ohmi, Tadahiro , Suzuki, Nobumasa, c/o Canon Kabushiki Kaisha , Shinohara, Toshikuni, c/o Canon Kabushiki Kaisha , Ohsawa, Hiroshi, c/o Canon Kabushiki Kaisha , Hirayama, Masaki, c/o Canon Kabushiki Kaisha , Tanaka, Nobuyoshi c/o Canon Kabushiki Kaisha
IPC分类号： H01S3/0973 , H01S3/03 , H01S3/225 , H01L21/027 , G03F7/20
CPC分类号： H01S3/0315 , G03F7/70383 , H01S3/0385 , H01S3/0975 , H01S3/225
摘要： A plasma is excited uniformly as a whole over the length of each slot. A laser oscillating apparatus is designed to excite a laser gas in a laser tube (2) by introducing electromagnetic waves into the laser tube through a plurality of slots (10) formed in a waveguide wall and generate a laser beam by resonating the light generated from the laser gas. A least one electrode (13) is placed near the slot (10). By giving a predetermined current density to the electrode (13), the intensity distribution of light generated from the laser gas above the slot (10) is controlled.
摘要翻译： 等离子体在整个长度上均匀地被激发。 激光振荡装置被设计为通过在形成于波导壁中的多个槽（10）中将电磁波引入到激光管中来激励激光管（2）中的激光气体，并且通过使从其产生的光谐振以产生激光束 激光气体。 至少一个电极（13）放置在槽（10）附近。 通过给电极（13）提供预定的电流密度，控制从槽（10）上方的激光气体产生的光的强度分布。
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4.发明公开Laser oscillating apparatus, exposure apparatus using the same, and device fabrication method 有权激光装置中，使用相同的制造方法的曝光装置
公开(公告)号：EP1026796A2
公开(公告)日：2000-08-09
申请号：EP00300719.2
申请日：2000-01-31
发明人： Ohmi, Tadahiro , Suzuki, Nobumasa, c/o Canon Kabushiki Kaisha , Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha , Hirayama, Masaki, c/o Canon Kabushiki Kaisha , Ohsawa, Hiroshi, c/o Canon Kabushiki Kaisha , Shinohara, Toshikuni, c/o Canon Kabushiki Kaisha
IPC分类号： H01S3/0973 , H01S3/225 , H01S3/03 , H01L21/027
CPC分类号： G03F7/70025 , H01S3/0315 , H01S3/0385 , H01S3/225
摘要： In a laser oscillating apparatus for exciting a laser gas in a laser tube by introducing an electromagnetic wave from a waveguide (1) into the laser tube (2) through a plurality of slots (10) formed in a waveguide wall, and generating a laser beam by resonating light emitted from the laser gas, the slots (10) are formed in a line such that their longitudinal direction is consistent with the longitudinal direction of the waveguide (1), and a metal wall (12) is so formed as to surround these slots. This metal wall (12) forms a gap as a microwave passage from the slots (10) to a window (15) in the laser tube wall, thereby spacing the laser tube wall apart from the slots (10) by a predetermined distance.
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