公开(公告)号：EP1677119B1

公开(公告)日：2013-01-16

申请号：EP05025583.5

申请日：2005-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru

IPC分类号： G01R15/20

CPC分类号： G01R15/205

公开(公告)号：EP1790986A3

公开(公告)日：2010-01-06

申请号：EP06124691.4

申请日：2006-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru

IPC分类号： G01P15/105 ,  G01P15/18 ,  G01P15/08

CPC分类号： G01P15/105 ,  G01P15/0891 ,  G01P15/18

摘要： A spring member (21) used in an acceleration sensor, for supporting weight members (22a-22d) that cooperate as magnetic field generation members or magnetic field detection sensors includes at least one strip-shaped plate spring (21b,21c) with a fulcrum and support sections (21d-21g) separated from the fulcrum for supporting the weight members (22a-22d). The at least one strip-shaped plate spring (21b,21c) is configured to produce a bending stress in response to an external force applied so as to displace the weight members (22a-22d).

公开(公告)号：EP1677119A3

公开(公告)日：2006-08-23

申请号：EP05025583.5

申请日：2005-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru

IPC分类号： G01R15/20

CPC分类号： G01R15/205

摘要： The present invention provides a compact current sensor. A current sensor includes: a first magnetoresistive element (21) including a plurality of element patterns (21A,21B) which extend in an X axis direction at a first level (L1), are disposed so as to be adjacent to each other in a Y axis direction orthogonal to the X axis direction, and are connected in parallel with each other; and a thin film coil (31) which includes a plurality of winding body portions extending in the X axis direction in correspondence with the element patterns (21A,21B) and winds at a second level (L2) different from the first level (L1), and applies a current magnetic field to each of the element patterns when a current to be detected is supplied. Therefore, the absolute value of the resistance change amount in the magnetoresistive element increases. While realizing a compact configuration, the current to be detected, flowing in the thin film coil can be measured with high precision.

摘要翻译： 本发明提供了一种小型电流传感器。 电流传感器包括：第一磁阻元件（21），其包括沿第一水平面（L1）在X轴方向上延伸的多个元件图案（21A，21B），以彼此相邻的方式 与X轴方向正交的Y轴方向，并且彼此并联连接; 以及薄膜线圈（31），该薄膜线圈（31）包括与元件图案（21A，21B）对应地在X轴方向上延伸并且以不同于第一级（L1）的第二级（L2）卷绕的多个卷绕体部分， 并且在供应待检测电流时将电流磁场施加到每个元件图案。 因此，磁阻元件的电阻变化量的绝对值增大。 在实现紧凑配置的同时，可以高精度测量流入薄膜线圈的待检测电流。

公开(公告)号：EP1677119A2

公开(公告)日：2006-07-05

申请号：EP05025583.5

申请日：2005-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru

IPC分类号： G01R15/20

CPC分类号： G01R15/205

摘要： The present invention provides a compact current sensor capable of measuring a current to be detected with high precision. A current sensor includes: a first magnetoresistive element including a plurality of element patterns which extend in an X axis direction at a first level, are disposed so as to be adjacent to each other in a Y axis direction orthogonal to the X axis direction, and are connected in parallel with each other; and a thin film coil which includes a plurality of winding body portions extending in the X axis direction in correspondence with the element patterns and winds at a second level different from the first level, and applies a current magnetic field to each of the element patterns when a current to be detected is supplied. Therefore, the absolute value of the resistance change amount in the magnetoresistive element increases. While realizing a compact configuration, the current to be detected, flowing in the thin film coil can be measured with high precision.

摘要翻译： 本发明提供了一种能够以高精度测量待检测电流的小型电流传感器。 本发明提供一种电流传感器，其特征在于，包括：第一磁阻效应元件，该第一磁阻效应元件具有在X轴方向上以第一水平方向延伸的多个元件图案，并在与该X轴方向正交的Y轴方向上相邻配置， 彼此并联连接; 以及薄膜线圈，其包括与元件图案对应地在X轴方向上延伸的多个卷绕体部分，并且以与第一级别不同的第二级别卷绕，并且当电流磁场施加到每个元件图案时 提供要检测的电流。 因此，磁阻元件的电阻变化量的绝对值增大。 在实现紧凑配置的同时，可以高精度测量流入薄膜线圈的待检测电流。

公开(公告)号：EP1790986B1

公开(公告)日：2011-01-12

申请号：EP06124691.4

申请日：2006-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru

IPC分类号： G01P15/105 ,  G01P15/18 ,  G01P15/08

CPC分类号： G01P15/105 ,  G01P15/0891 ,  G01P15/18

公开(公告)号：EP1790987B1

公开(公告)日：2010-06-30

申请号：EP06124696.3

申请日：2006-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru ,  Kuwahara, Tsuneo

IPC分类号： G01P15/105 ,  G01P15/18 ,  G01R33/09

CPC分类号： G01P15/105 ,  G01P15/18 ,  G11B5/012 ,  G11B5/54 ,  G11B19/04 ,  G11B25/043 ,  G11B33/08

摘要： An acceleration sensor includes a housing member (20), first and second magnetic field generation members with weights (22a-22d), a spring member (21) with a fulcrum (26) attached to the housing member (20), for supporting the first and second magnetic field generation members with weights (22a-22d) and for displacing the first and second magnetic field generation members with weights (22a-22d) when an external force with components in first and second axis directions that are perpendicular to each other is applied, and first and second magnetic field detection sensors (23,24) attached to the housing member (20) to face the first and second magnetic field generation members with weights (22a-22d), respectively. Each of the first and second magnetic field detection sensors (23,24) has two pairs of multi-layered magnetoresistive effect elements (23a-23d,24a-24d) each including a magnetization fixed layer and a magnetization free layer. The magnetization fixed layer is magnetically fixed along a direction parallel to a direction of displacement of the first and second magnetic field generation members with weights (22a-22d). One pair of the multi-layered magnetoresistive effect elements (23a,23b) in the first magnetic field detection sensor (23) and one pair of the multi-layered magnetoresistive effect elements (24b,24a) in the second magnetic field detection sensor (24) are connected in full-bridge configuration. The other pair of the multi-layered magnetoresistive effect elements (23c,23d) in the first magnetic field detection sensor (23) and the other pair of the multi-layered magnetoresistive effect elements (24c,24d) in the second magnetic field detection sensor (24) are connected in full-bridge configuration.

公开(公告)号：EP1790987A1

公开(公告)日：2007-05-30

申请号：EP06124696.3

申请日：2006-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru ,  Kuwahara, Tsuneo

IPC分类号： G01P15/105 ,  G01P15/18 ,  G01R33/09

CPC分类号： G01P15/105 ,  G01P15/18 ,  G11B5/012 ,  G11B5/54 ,  G11B19/04 ,  G11B25/043 ,  G11B33/08

摘要： An acceleration sensor includes a housing member (20), first and second magnetic field generation members with weights (22a-22d), a spring member (21) with a fulcrum (26) attached to the housing member (20), for supporting the first and second magnetic field generation members with weights (22a-22d) and for displacing the first and second magnetic field generation members with weights (22a-22d) when an external force with components in first and second axis directions that are perpendicular to each other is applied, and first and second magnetic field detection sensors (23,24) attached to the housing member (20) to face the first and second magnetic field generation members with weights (22a-22d), respectively. Each of the first and second magnetic field detection sensors (23,24) has two pairs of multi-layered magnetoresistive effect elements (23a-23d,24a-24d) each including a magnetization fixed layer and a magnetization free layer. The magnetization fixed layer is magnetically fixed along a direction parallel to a direction of displacement of the first and second magnetic field generation members with weights (22a-22d). One pair of the multi-layered magnetoresistive effect elements (23a,23b) in the first magnetic field detection sensor (23) and one pair of the multi-layered magnetoresistive effect elements (24b,24a) in the second magnetic field detection sensor (24) are connected in full-bridge configuration. The other pair of the multi-layered magnetoresistive effect elements (23c,23d) in the first magnetic field detection sensor (23) and the other pair of the multi-layered magnetoresistive effect elements (24c,24d) in the second magnetic field detection sensor (24) are connected in full-bridge configuration.

摘要翻译： 加速度传感器包括壳体构件（20），具有重物（22a-22d）的第一和第二磁场产生构件，具有附接到壳体构件（20）的支点（26）的弹簧构件（21），用于支撑 具有重物（22a-22d）的第一和第二磁场产生部件，并且当具有彼此垂直的第一和第二轴向方向的分力的外力时，使第一和第二磁场产生部件具有重物（22a-22d） 并且第一和第二磁场检测传感器（23,24）分别附接到壳体构件（20）以面对具有重物（22a-22d）的第一和第二磁场产生构件。 第一和第二磁场检测传感器（23,24）中的每一个具有两对各自包括磁化固定层和无磁化层的多层磁阻效应元件（23a-23d，24a-24d）。 磁化固定层沿着平行于具有重物（22a-22d）的第一和第二磁场产生构件的位移方向的方向磁性固定。 第一磁场检测传感器（23）中的一对多层磁阻效应元件（23a，23b）和第二磁场检测传感器（24）中的一对多层磁阻效应元件（24b，24a） ）以全桥配置连接。 第一磁场检测传感器（23）中的另一对多层磁阻效应元件（23c，23d）和第二磁场检测传感器中的另一对多层磁阻效应元件（24c，24d） （24）以全桥配置连接。

公开(公告)号：EP1790986A2

公开(公告)日：2007-05-30

申请号：EP06124691.4

申请日：2006-11-23

申请人： TDK Corporation

发明人： Shoji, Shigeru

IPC分类号： G01P15/105 ,  G01P15/18 ,  G01P15/08

CPC分类号： G01P15/105 ,  G01P15/0891 ,  G01P15/18

摘要： A spring member (21) used in an acceleration sensor, for supporting weight members (22a-22d) that cooperate as magnetic field generation members or magnetic field detection sensors includes at least one strip-shaped plate spring (21b,21c) with a fulcrum and support sections (21d-21g) separated from the fulcrum for supporting the weight members (22a-22d). The at least one strip-shaped plate spring (21b,21c) is configured to produce a bending stress in response to an external force applied so as to displace the weight members (22a-22d).

摘要翻译： 在加速度传感器中使用的用于支撑作为磁场产生部件或磁场检测传感器配合的配重部件（22a-22d）的弹簧部件（21）包括至少一个具有支点的带状板簧（21b，21c） 以及从用于支撑配重构件（22a-22d）的支点分离的支撑部（21d-21g）。 所述至少一个带状板簧（21b，21c）构造成响应于施加的外力而产生弯曲应力，以使所述配重构件（22a-22d）移位。

公开(公告)号：EP1666894A1

公开(公告)日：2006-06-07

申请号：EP05025790.6

申请日：2005-11-25

申请人： TDK Corporation

发明人： Shoji, Shigeru

IPC分类号： G01R15/20 ,  G01R33/09

CPC分类号： B82Y25/00 ,  G01R15/205 ,  G01R33/093

摘要： The present invention provides a current sensor (1) capable of sensing a current to be detected with high precision while realizing a compact configuration. The current sensor includes a first MR element (21) including element patterns (21A,21B) disposed at a first level (L1), a second MR element (22) including element patterns (22A,22B) disposed at a second level (L2), and a thin film coil (31) which winds at a third level provided between the first and second levels while including winding body portions (31A,31B) extending in an X axis direction in correspondence with the element patterns of the first and second MR elements, and which applies a current magnetic field to each of the element patterns when a current to be detected is supplied. Therefore, by using both of the first and second MR elements, the current magnetic field can be detected with high sensitivity and high precision.

摘要翻译： 本发明提供一种电流传感器（1），其能够在实现紧凑的结构的同时以高精度感测要检测的电流。 电流传感器包括：第一MR元件（21），包括设置在第一电平（L1）的元件图案（21A，21B）;第二MR元件（22），包括设置在第二电平（L2 ）和薄膜线圈（31），所述薄膜线圈（31）在设置在所述第一和第二水平面之间的第三水平处卷绕，同时包括对应于所述第一和第二水平面的元件图案沿X轴方向延伸的卷绕主体部分（31A，31B） MR元件，并且当提供要检测的电流时，对每个元件图案施加电流磁场。 因此，通过使用第一和第二MR元件两者，可以以高灵敏度和高精度检测电流磁场。