公开(公告)号：EP4417951A1

公开(公告)日：2024-08-21

申请号：EP24157840.0

申请日：2024-02-15

申请人： TE Connectivity Solutions GmbH

发明人： Fong, Jeffrey C. ,  O'Brien, Daniel T.

IPC分类号： G01L9/00 ,  G01L13/02 ,  G01L15/00

CPC分类号： G01L9/0047 ,  G01L9/0045 ,  G01L9/0054 ,  G01L13/025 ,  G01L15/00

摘要： A sensor die (100) includes a diaphragm (110) having a first membrane (130) and a second membrane (140) positioned within the first membrane (130). The first membrane (130) is deflectable in proportion with a differential pressure between a first side (112) of the diaphragm (110) and a second side (114) of the diaphragm (110) opposite the first side (112). The second membrane (140) is deflectable simultaneously with the first membrane (130) in proportion with an absolute pressure on the first side (112) of the diaphragm (110).