公开(公告)号：EP1634052A2

公开(公告)日：2006-03-15

申请号：EP04754451.5

申请日：2004-06-04

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

发明人： LIU, Chang ,  CHEN, Jack ,  ENGEL, Jonathan

IPC分类号： G01N1/00

CPC分类号： G01K7/186 ,  G01F1/28 ,  G01F1/6845 ,  G01K7/015 ,  G01L5/228 ,  G01L19/0092 ,  G01N13/00 ,  G01N2203/0676 ,  G01P5/12 ,  Y10T29/49103

摘要： A sensor chip 10, comprising a flexible, polymer-based substrate 12, 72, and at least one microfabricated sensor 16, 18, 20, 22, 74, 76, 78, 80 disposed on the substrate and including a conductive element 24, 26, 34. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes 14, 70.