公开(公告)号：EP1567687A1

公开(公告)日：2005-08-31

申请号：EP03783342.3

申请日：2003-11-12

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

发明人： LIU, Chang

IPC分类号： C23C14/52

CPC分类号： C23C14/545 ,  B05D1/62

摘要： A material deposition sensor includes a heater (24) and a temperature sensor (30) separated from one another. In operation, the sensor is disposed within a deposition chamber, and material is deposited onto the sensor. When a particular material thickness is deposited, a direct thermally conductive path is created between the heater and temperature sensor, and heat from the heater conducts directly to the temperature sensor. By predetermining a deposition thickness necessary to create the direct thermally conductive path, the deposition thickness can be controlled and/or predicted.

公开(公告)号：EP1629507A2

公开(公告)日：2006-03-01

申请号：EP04752235.4

申请日：2004-05-14

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  Northwestern University

发明人： LIU, Chang ,  ZOU, Jun ,  WANG, Xuefeng ,  BULLEN, David ,  MIRKIN, Chad ,  ZHANG, Hua

IPC分类号： G12B21/02 ,  B81B3/00 ,  B81B1/00 ,  B82B3/00 ,  G03F7/20

CPC分类号： G01Q70/16 ,  G01Q70/06 ,  G01Q80/00 ,  G03F7/0002 ,  Y10S977/857 ,  Y10S977/86 ,  Y10S977/875 ,  Y10S977/877

摘要： A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.

公开(公告)号：EP1560642A2

公开(公告)日：2005-08-10

申请号：EP03776285.3

申请日：2003-10-09

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

发明人： LIU, Chang ,  SHAIKH, Kashah ,  RYU, Kee ,  GOLUCH, Edgar ,  FAN, Zhifang ,  BULLEN, David

IPC分类号： B01F5/06

CPC分类号： B01L3/502738 ,  B01F7/00291 ,  B01F13/0059 ,  B01F13/0827 ,  B01F2215/0037 ,  B01L3/502707 ,  B01L2200/027 ,  B01L2200/10 ,  B01L2200/12 ,  B01L2300/0645 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/0418 ,  B01L2400/0475 ,  B01L2400/0481 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0036 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0055 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T156/1089 ,  Y10T436/2575

摘要： A microfluidic system includes one or more functional units (30, 32, 34, 36, 300, 302, 304, 306, 400) or microfluidic chips, configured to perform constituent steps in a process and interconnected to form the system. A multi-layer microfluidic system includes a separate dedicated fluid layer (402) and dedicated electromechanical layer (404) connected via through-holes (410). Electromechanical components (412) are formed on the electromechanical layer.

公开(公告)号：EP2029300A2

公开(公告)日：2009-03-04

申请号：EP07852379.2

申请日：2007-06-01

申请人： The Board Of Trustees Of The University Of Illinois

发明人： LIU, Chang ,  ENGEL, Jonathan ,  CHEN, Nannan ,  RYU, Kee ,  LIU, Chang ,  TUCKER, Craig ,  YANG, Yingchen

IPC分类号： B23B7/02

CPC分类号： B01L3/502707 ,  B01L2200/12 ,  B01L2300/0645 ,  B01L2300/0887 ,  B01L2300/1827 ,  B81C99/0095 ,  B82Y10/00 ,  H01L51/0595

摘要： A microscale polymer-based apparatus comprises a substrate formed from a first polymer material and at least one active region integrated with the substrate. The at least one active region is patterned from a second polymer material that is modified to perform at least one function within the at least one active region.

摘要翻译： 微型聚合物基装置包括由第一聚合物材料形成的基板和与基板结合的至少一个有源区。 所述至少一个有源区由第二聚合物材料图案化，所述第二聚合物材料被修改以在所述至少一个有源区内执行至少一个功能。

公开(公告)号：EP1634052A2

公开(公告)日：2006-03-15

申请号：EP04754451.5

申请日：2004-06-04

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

发明人： LIU, Chang ,  CHEN, Jack ,  ENGEL, Jonathan

IPC分类号： G01N1/00

CPC分类号： G01K7/186 ,  G01F1/28 ,  G01F1/6845 ,  G01K7/015 ,  G01L5/228 ,  G01L19/0092 ,  G01N13/00 ,  G01N2203/0676 ,  G01P5/12 ,  Y10T29/49103

摘要： A sensor chip 10, comprising a flexible, polymer-based substrate 12, 72, and at least one microfabricated sensor 16, 18, 20, 22, 74, 76, 78, 80 disposed on the substrate and including a conductive element 24, 26, 34. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes 14, 70.

公开(公告)号：EP1938081A1

公开(公告)日：2008-07-02

申请号：EP06803585.6

申请日：2006-09-14

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

发明人： WANG, Xuefeng ,  LIU, Chang

IPC分类号： G01N13/10 ,  G12B21/02 ,  G03F7/20

CPC分类号： G01Q70/16 ,  G01Q70/06 ,  G01Q70/14 ,  G01Q80/00 ,  G01R1/06727 ,  G01R3/00 ,  G03F7/0002 ,  G03F7/2049

摘要： A probe array for includes a handle, a first probe and a second probe. The first probe has a first shank, connected to the handle, and a first tip; and the second probe has a second shank, connected to the handle, and second tip. The first tip contains a different material from the second tip. The probe array may be used to write on a surface by contacting the first tip with a surface, where a first ink is on the first tip. This writing method may further include lifting the first tip from the surface and contacting the second tip with the surface.