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    Microfabricated tuning fork gyroscope for sensing out-of-plane rotation
    3.
    发明公开
    Microfabricated tuning fork gyroscope for sensing out-of-plane rotation 有权
    Mikromechanisch hergestellter Stimmgabelkreisel zur Messung von Drehungen ausserhalb der Ebene

    公开(公告)号：EP1744121A1

    公开(公告)日：2007-01-17

    申请号：EP06022954.9

    申请日：2000-09-07

    申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

    发明人： Weinberg, Marc S. ,  Bernstein, Jonathan J. ,  Kirkos, Gregory A. ,  Lee, Tommy W. ,  Petrovich, Anthony

    IPC分类号： G01C19/00 ,  G01C19/56

    CPC分类号： G01C19/5719

    摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. Proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.

    摘要翻译： 微机械音叉陀螺仪具有离开结构平面的输入轴。 梳状驱动器的质量梳齿在固定驱动梳之间啮合，固定驱动梳被成对180°异相电激励。 随着证据质量响应于角度输入而变化，证明质量梳与固定梳之间的距离发生变化，从而改变梳之间的电容，从而导致作为输入速率指示的检测质量的不平衡电压 。 平面外拨叉陀螺仪可以与两个平面内音叉陀螺仪结合，以便从单个晶片或单个芯片提供完整的三轴惯性测量单元。

    Comb drive micromechanical tuning fork gyro
    4.
    发明公开
    Comb drive micromechanical tuning fork gyro 失效
    Mikromechanischer Stimmgabelumdrehungsmesser mitkammförmigenAntriebselemente。

    公开(公告)号：EP0664438A1

    公开(公告)日：1995-07-26

    申请号：EP94400150.2

    申请日：1994-01-25

    申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

    发明人： Bernstein, Jonathan J. ,  Weinberg, Marc S.

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5755 ,  G01C19/574

    摘要： A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive (40,42) and driven (36,38) finger electrodes associated with each of two vibrating elements (18,20). The vibrating elements (18,20) are supported in a rotatable assembly (16) between first and second support electrodes (22,24) which are in turn suspended by flexures (28,26) for rotation about an axis passing through the flexures (28,26) and through a point midway between the vibrating elements (18,20). Additional masses (74,76) are formed onto the vibrating elements (18,20) to improve overall sensor sensitivity. Sense electrodes (54,60,56,58) for detecting capacitive changes between the support electrodes (22,24) and the sense electrodes (54,60,56,58) are positioned at each end of the support electrodes (22,24). Drive electronics (62) are connected between the driven fingers (36,38) of the vibrating elements (18,20) and the drive electrode fingers (40,42) which mesh with them to cause vibration. Excitation is provided between the support electrodes (22,24) and the sense electrodes (54,60,56,58). Any change in signal resulting from rotation of the assembly (16) and the resulting variation in capacitance between the support electrodes (22,24) and the sense electrodes (54,60,56,58) is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes (54,60,56,58) in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

    摘要翻译： 一种微制造的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件（18,20）中的每一个相关联的一组啮合驱动（40,42）和驱动（36,38）指状电极而连通。 振动元件（18,20）被支撑在第一和第二支撑电极（22,24）之间的可旋转组件（16）中，所述第一和第二支撑电极（22,24）又由挠曲件（28,26）悬挂以围绕通过挠曲件 28,26）并通过振动元件（18,20）之间的中点。 附加的质量（74,76）形成在振动元件（18,20）上以提高整体传感器灵敏度。 用于检测支撑电极（22,24）和感测电极（54,60,56,58）之间的电容变化的感测电极（54,60,56,58）位于支撑电极（22,24）的每一端 ）。 驱动电路（62）连接在振动元件（18,20）的驱动指状物（36,38）和与它们啮合的驱动电极指（40,42）之间以产生振动。 在支撑电极（22,24）和感测电极（54,60,56,58）之间提供激励。 由组件（16）的旋转引起的信号的任何变化以及所产生的支撑电极（22,24）和感测电极（54,60,56,58）之间的电容变化被感测为惯性速率的量度。 可以使用感测电极（54,60,56,58）另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中性位置。