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    Microfabricated tuning fork gyroscope for sensing out-of-plane rotation
    2.
    发明公开
    Microfabricated tuning fork gyroscope for sensing out-of-plane rotation 有权
    Mikromechanisch hergestellter Stimmgabelkreisel zur Messung von Drehungen ausserhalb der Ebene

    公开(公告)号：EP1744121A1

    公开(公告)日：2007-01-17

    申请号：EP06022954.9

    申请日：2000-09-07

    申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

    发明人： Weinberg, Marc S. ,  Bernstein, Jonathan J. ,  Kirkos, Gregory A. ,  Lee, Tommy W. ,  Petrovich, Anthony

    IPC分类号： G01C19/00 ,  G01C19/56

    CPC分类号： G01C19/5719

    摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. Proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.

    摘要翻译： 微机械音叉陀螺仪具有离开结构平面的输入轴。 梳状驱动器的质量梳齿在固定驱动梳之间啮合，固定驱动梳被成对180°异相电激励。 随着证据质量响应于角度输入而变化，证明质量梳与固定梳之间的距离发生变化，从而改变梳之间的电容，从而导致作为输入速率指示的检测质量的不平衡电压 。 平面外拨叉陀螺仪可以与两个平面内音叉陀螺仪结合，以便从单个晶片或单个芯片提供完整的三轴惯性测量单元。