公开(公告)号：EP1902323A2

公开(公告)日：2008-03-26

申请号：EP06784891.1

申请日：2006-06-14

申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

发明人： WEINBERG, Marc, S. ,  BERNSTEIN, Jonathan ,  BORENSTEIN, Jeffrey, T. ,  ELLIOTT, Richard ,  KIRKOS, Gregory ,  KOUREPENIS, Anthony, S.

IPC分类号： G01P9/04 ,  G01P15/125

CPC分类号： G01C19/5733 ,  G01P15/125

摘要： A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.

公开(公告)号：EP0970349A1

公开(公告)日：2000-01-12

申请号：EP98906689.9

申请日：1998-02-24

申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

发明人： WARD, Paul, A. ,  HILDEBRANT, Eric, M. ,  NILES, Lance, C. ,  WEINBERG, Marc, S. ,  KOUREPENIS, Anthony, S.

IPC分类号： G01C19/00

CPC分类号： G01C19/5719

摘要： A micromechanical tuning fork gyro having two center electrodes (9a, 9b). The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses (3a, 3b) are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes equal, hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does not effect sense axis output signals.

摘要翻译： 具有两个中心电极（9a，9b）的微机械音叉陀螺仪。 两个中心电极由相反极性的偏置电位激励。 相反偏置的中心电极提供跨越陀螺仪的电对称性，从而减少电荷瞬变和对垂直平移的敏感度。 直接注入到检测质量块（3a，3b）中的电流是相等的并且相反并且因此取消。 作用在检测质量和交错电极上的电动机升力相等，因此检测质量以纯平移运动，从而降低了同相偏压。 此外，垂直于陀螺仪平面的任何纯粹的平移都不会影响感测轴输出信号。

公开(公告)号：EP0962052B1

公开(公告)日：2009-01-14

申请号：EP98910052.4

申请日：1998-02-24

申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

发明人： WEINBERG, Marc, S. ,  WARD, Paul, A. ,  KOUREPENIS, Anthony, S.

IPC分类号： H03L7/00 ,  H03B5/30 ,  G01C19/56

CPC分类号： G01C19/574 ,  H03H9/02448 ,  H03H9/2405 ,  H03H9/2426 ,  H03H2009/02496 ,  H03H2009/02511 ,  H03L1/02 ,  H03L7/099

摘要： Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope (4). Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope (4), resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop (8) whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage (Vref).

公开(公告)号：EP0970349B1

公开(公告)日：2005-08-10

申请号：EP98906689.9

申请日：1998-02-24

申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

发明人： WARD, Paul, A. ,  HILDEBRANT, Eric, M. ,  NILES, Lance, C. ,  WEINBERG, Marc, S. ,  KOUREPENIS, Anthony, S.

IPC分类号： G01C19/00 ,  G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5719

公开(公告)号：EP0962052A1

公开(公告)日：1999-12-08

申请号：EP98910052.0

申请日：1998-02-24

申请人： THE CHARLES STARK DRAPER LABORATORY, INC.

发明人： WEINBERG, Marc, S. ,  WARD, Paul, A. ,  KOUREPENIS, Anthony, S.

IPC分类号： G01P9 ,  G01C19 ,  H03B5 ,  H03H9 ,  H03L1 ,  H03L7

CPC分类号： G01C19/574 ,  H03H9/02448 ,  H03H9/2405 ,  H03H9/2426 ,  H03H2009/02496 ,  H03H2009/02511 ,  H03L1/02 ,  H03L7/099

摘要： Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope (4). Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope (4), resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop (8) whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage (Vref).