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    RESONATOR WITH REDUCED ACCELERATION SENSITIVITY AND PHASE NOISE USING TIME DOMAIN SWITCH
    2.
    发明授权
    RESONATOR WITH REDUCED ACCELERATION SENSITIVITY AND PHASE NOISE USING TIME DOMAIN SWITCH 有权
    利用时域开关降低加速度灵敏度和相位噪声的谐振器

    公开(公告)号：EP2769467B8

    公开(公告)日：2016-12-21

    申请号：EP12842190.6

    申请日：2012-10-04

    申请人： Lumedyne Technologies Incorporated ,  United States of America as Represented by the Secretary of the Navy

    发明人： WATERS, Richard ,  SWANSON, Paul D.

    IPC分类号： H03H9/02 ,  H03H9/24

    CPC分类号： H03H9/02433 ,  H03H9/2405 ,  H03H2009/02267

    摘要： A resonator comprising: a frame; a first oscillator configured to oscillate with respect to the frame; a first driver configured to drive the first oscillator at the first oscillator's resonant frequency; a first half of a first relative position switch mounted to the first oscillator; a second oscillator having substantially the same resonant frequency as the first oscillator, wherein the first and second oscillators are designed to respond in substantially the same manner to external perturbations to the frame; a second half of the first relative position switch mounted to the second oscillator; and wherein as the first oscillator oscillates there is relative motion between the first and second oscillators such that the first relative position switch passes through a closed state in each oscillation when the first and second switch halves pass by each other.

    A NANOMECHANICAL RESONATOR ARRAY AND PRODUCTION METHOD THEREOF
    3.
    发明授权
    A NANOMECHANICAL RESONATOR ARRAY AND PRODUCTION METHOD THEREOF 有权
    纳米机械谐振器阵列及其生产方法

    公开(公告)号：EP2987239B1

    公开(公告)日：2016-12-14

    申请号：EP13721927.5

    申请日：2013-04-19

    申请人： KOC Universitesi

    发明人： ALACA, Burhanettin, Erdem ,  LEBLEBICI, Yusuf ,  YORULMAZ, Ismail ,  KILINC, Yasin ,  AKSOY, Bekir

    IPC分类号： H03H9/24

    CPC分类号： H03H9/2463 ,  B82B1/005 ,  B82Y15/00 ,  B82Y40/00 ,  H03B5/30 ,  H03H9/2405 ,  H03H2009/02291 ,  Y10S977/762 ,  Y10S977/888 ,  Y10S977/956

    摘要： In the present invention, a nanomechanical resonator array (1), which is suitable being used in an oscillator and production method of said nanomechanical resonator array are developed. Said resonator array (1) comprises at least two resonators (2), which are in the size of nanometers, which are vertically arrayed and which are preferably in the form of nano-wire or nano-tube; at least one coupling membrane (3), which mechanically couples said resonators (2) from their one ends, and at least one clamping element (4), which supports mechanical coupling by clamping said coupling membrane (3). Said resonator array (1) can be actuated and its displacements can be sensed. The present invention develops a predictive model of the frequency response of an oscillator comprising the said resonator array (1) for electrostatic actuation and capacitive readout. An oscillator comprised of multiple resonator arrays (1) with different frequency responses connected to a frequency manipulation circuitry can be used as well. For silicon-based systems, said production method comprises the steps of patterning two windows on device silicon layer exposing it to plasma etching using Bosch process; carrying out a further oxidation to form nanowires in an oxide envelop; depositing further sacrificial material. Actuation and readout electrode integration comprises steps of electrode material deposition; self-aligned mask material deposition, chemical mechanical polishing; electrode material etch; releasing nanowires by etching sacrificial material and oxide envelope. For non-silicon-based systems, said production method comprises the steps of structural and sacrificial material deposition; patterning and anisotropic etching of both materials; isotropic etching of sacrificial material.

    MODULE DE DÉCOUPLAGE MÉCANIQUE D'UN RÉSONATEUR À GRAND COEFFICIENT DE QUALITÉ
    7.
    发明公开
    MODULE DE DÉCOUPLAGE MÉCANIQUE D'UN RÉSONATEUR À GRAND COEFFICIENT DE QUALITÉ 有权
    MODUL ZUR MECHANISCHEN ABKOPPLUNG EINES谐振器MIT HOHEMQUALITÄTSFAKTOR

    公开(公告)号：EP2591549A1

    公开(公告)日：2013-05-15

    申请号：EP11746592.2

    申请日：2011-07-04

    申请人： Office National D'etudes Et De Recherches Aérospatiales (ONERA)

    发明人： BAHRIZ, Michaël ,  LE TRAON, Olivier

    IPC分类号： H03H9/24 ,  H03H9/02

    CPC分类号： H03H9/2405 ,  H03H9/02338 ,  H03H9/02433 ,  H03H9/2452 ,  H03H2009/0244 ,  H03H2009/02503

    摘要： The invention relates to a device (10) comprising: a cylindrical resonator (R) vibrating in extension/compression along a longitudinal axis (Δ) and having a vibration node (N) in the mid-plane (π) thereof, said vibration naturally generating radial extension/compression deformations; and a mechanical uncoupling module comprising a hollow cylinder (2) surrounding the resonator and a membrane (1) disposed in the aforementioned mid-plane and rigidly connected to the cylindrical surface of the resonator and internal cylindrical surface of the hollow cylinder. The hollow cylinder vibrates in extension/compression in phase opposition with the vibration of the resonator, such that the effects of the radial deformations experienced by the hollow cylinder and the resonator offset one another in an area (ZF) located on the external surface of the hollow cylinder close to the mid-plane.

    摘要翻译： 装置（10）包括沿其纵向轴线（＆Dgr）以延伸压缩振动并且在其中间平面（＆amp;）中具有振动节点（N）的圆柱形谐振器（R），所述振动自然产生径向延伸/ 压缩变形，以及包括围绕谐振器的中空圆柱体（2）和位于上述中间平面中并且刚性地连接到谐振器的圆柱形表面并且与中空部分的内部圆柱形表面的膜（1）的机械解耦模块 圆筒。 中空圆筒以谐振器的振动反相振动，使得中空圆筒和谐振器的径向变形的作用在位于中空部分的外表面上的区域（ZF）中相互补偿。 气缸靠近中平面。

    RESONATOR DEVICE AND METHOD OF OPTIMIZING A Q-FACTOR
    9.
    发明公开
    RESONATOR DEVICE AND METHOD OF OPTIMIZING A Q-FACTOR 有权
    Resonatorvorrichtung und Verfahren zur Optimierung einerGüte

    公开(公告)号：EP2409403A1

    公开(公告)日：2012-01-25

    申请号：EP10710446.5

    申请日：2010-03-15

    申请人： NXP B.V.

    发明人： STEENEKEN, Peter

    IPC分类号： H03H9/02 ,  H03H9/24

    CPC分类号： H03H9/02433 ,  H03H9/2405 ,  H03H9/2436 ,  H03H2009/02354 ,  H03H2009/0237 ,  H03H2009/0244 ,  H03H2009/02527 ,  H03H2009/2442

    摘要： A resonator device (200) comprises a base (206) comprising an anchor (204) and a vibration unit (212) connected to the anchor (204). The vibration unit (212) is configured to have a first vibration mode (218) and a second vibration mode (216) different from the first vibration mode (218). According to an embodiment, the vibration unit (212) is configured such that the first vibration mode (218) and the second vibration mode (216) destructively interfere at the anchor (204).

    摘要翻译： 谐振器装置（200）包括基座（206），其包括连接到锚（204）的锚（204）和振动单元（212）。 振动单元（212）被配置为具有与第一振动模式（218）不同的第一振动模式（218）和第二振动模式（216）。 根据实施例，振动单元（212）构造成使得第一振动模式（218）和第二振动模式（216）在锚（204）处相消干涉。

    MEMS resonators
    10.
    发明公开
    MEMS resonators 有权
    MEMS-Resonatoren

    公开(公告)号：EP2395660A1

    公开(公告)日：2011-12-14

    申请号：EP10165496.0

    申请日：2010-06-10

    申请人： NXP B.V.

    发明人： Lander, Robert

    IPC分类号： H03H9/02

    CPC分类号： H03H3/0076 ,  H03H9/02448 ,  H03H9/2405 ,  H03H2009/02307

    摘要： A crystalline semiconductor resonator device comprises two matched resonators which are aligned differently with respect to the crystal structure of the crystalline semiconductor. The resonators each comprise a portion of a material having a different temperature dependency of the Young's modulus to the temperature dependency of the Young's modulus of the crystalline semiconductor material. In this way, the suspension springs for the resonators have different properties, which influence the resonant frequency. The resonant frequency ratios between the first and second resonators at a calibration temperature and an operation temperature are measured. A frequency of one (or both) of the resonators at the operation temperature can then be derived which takes into account the temperature dependency of the one of the resonators.

    摘要翻译： 晶体半导体谐振器装置包括相对于晶体半导体的晶体结构不同地对准的两个匹配谐振器。 谐振器各自包括具有与结晶半导体材料的杨氏模量的杨氏模量与温度依赖性不同的温度依赖性的材料的一部分。 以这种方式，用于谐振器的悬架弹簧具有不同的性质，这影响谐振频率。 在校准温度和操作温度下测量第一和第二谐振器之间的谐振频率比。 然后可以导出在操作温度下的一个（或两个）谐振器的频率，其考虑到一个谐振器的温度依赖性。