Thermally stable actuator or sensor structure and method for manufacturing the same
    1.
    发明公开
    Thermally stable actuator or sensor structure and method for manufacturing the same 审中-公开
    Thermische stabile传感器 - 命令Aktorstruktur und deren Herstellungsverfahren

    公开(公告)号:EP1017115A2

    公开(公告)日:2000-07-05

    申请号:EP99124054.0

    申请日:1999-12-09

    申请人: TRW INC.

    IPC分类号: H01L41/053

    摘要: A singly or doubly encapsulated actuator/sensor package in which a ceramic actuator/sensor (10) may be first encapsulated in a primary encapsulating material (12) and is encapsulated in a fiber-reinforced composite material (20, 22). A combination of the material and lay-up angles (θ) of the fiber-reinforced composite material (20, 22) are used to control selection of a composite coefficient of thermal expansion (CTE) and the stiffness or compliance of the package with respect to a selected axis. By optimal selection of the material and the lay-up angle, based upon a suitable actuation strength figure of merit, a CTE of zero or a CTE matching that of an underlying structural member (24) is obtained, while simultaneously maximizing the actuation strength in a selected actuation direction. Application of the invention to precision structures permits the underlying structures to be designed with very low stiffness, because precise, thermally stable, pointing or shaping actuation forces may be obtained in a thermally stable manner.

    摘要翻译: 单个或双重封装的致动器/传感器封装,其中陶瓷致动器/传感器(10)可以首先封装在初级封装材料(12)中并被封装在纤维增强复合材料(20,22)中。 使用纤维增强复合材料(20,22)的材料和叠层角度(&重量)的组合来控制复合热膨胀系数(CTE)的选择以及包装的刚度或顺应性 相对于选定的轴。 通过优选选择材料和叠层角度,基于合适的致动强度品质因数,获得与下面的结构件(24)的CTE匹配的零或CTE的CTE,同时最大化驱动强度 选择的致动方向。 将本发明应用于精密结构允许底层结构被设计成具有非常低的刚度,因为可以以热稳定的方式获得精确的,热稳定的,指向或成形的致动力。