CHIP PREPARATION METHOD AND SYSTEM, AND CHIP

    公开(公告)号:EP4395168A1

    公开(公告)日:2024-07-03

    申请号:EP23866669.7

    申请日:2023-06-13

    IPC分类号: H03F7/04 G03F7/20

    摘要: A chip preparation method and system, and a chip are provided, relating to the field of micro/nanofabrication technologies. The method includes the following steps: preparing, by using a laser direct writing exposure manner, a first underlying circuit of an impedance Josephson parametric amplifier and a second underlying circuit for testing, to obtain a first chip product (201); generating, on the first chip product by using the laser direct writing exposure manner, a photoresist structure for preparing a Josephson junction (202); cutting, from the first chip product, a second chip product on which the second underlying circuit is located and a third chip product on which the first underlying circuit is located (203); trail producing a Josephson junction sample based on a photoresist structure corresponding to the second underlying circuit, to obtain an oxidation condition (204); preparing, according to the oxidation condition, the Josephson junction based on a photoresist structure corresponding to the first underlying circuit, to obtain a fourth chip product (205); and obtaining a target chip product based on the fourth chip product (206).