-
公开(公告)号:EP2029300A2
公开(公告)日:2009-03-04
申请号:EP07852379.2
申请日:2007-06-01
发明人: LIU, Chang , ENGEL, Jonathan , CHEN, Nannan , RYU, Kee , LIU, Chang , TUCKER, Craig , YANG, Yingchen
IPC分类号: B23B7/02
CPC分类号: B01L3/502707 , B01L2200/12 , B01L2300/0645 , B01L2300/0887 , B01L2300/1827 , B81C99/0095 , B82Y10/00 , H01L51/0595
摘要: A microscale polymer-based apparatus comprises a substrate formed from a first polymer material and at least one active region integrated with the substrate. The at least one active region is patterned from a second polymer material that is modified to perform at least one function within the at least one active region.
摘要翻译: 微型聚合物基装置包括由第一聚合物材料形成的基板和与基板结合的至少一个有源区。 所述至少一个有源区由第二聚合物材料图案化,所述第二聚合物材料被修改以在所述至少一个有源区内执行至少一个功能。