公开(公告)号：EP3271950B1

公开(公告)日：2019-03-06

申请号：EP16715932.6

申请日：2016-03-18

申请人： The Regents Of The University Of Michigan

发明人： FORREST, Stephen, R. ,  LEE, Kyusang ,  FAN, Dejiu

IPC分类号： H01L31/18 ,  H01L21/78

公开(公告)号：EP3271950A1

公开(公告)日：2018-01-24

申请号：EP16715932.6

申请日：2016-03-18

申请人： The Regents Of The University Of Michigan

发明人： FORREST, Stephen, R. ,  LEE, Kyusang ,  FAN, Dejiu

IPC分类号： H01L31/18 ,  H01L21/78

CPC分类号： H01L21/78 ,  C09K13/00 ,  C30B33/08 ,  H01L21/7813 ,  H01L31/1896 ,  H01L33/0079 ,  Y02E10/50

摘要： Disclosed herein are methods to eliminate or reduce the peeling-off of epitaxial lifted-off thin film epilayers on secondary host substrates that allow for the fabrication of high yield ELO processed thin film devices. The methods employ patterned strain-relief trenches.

公开(公告)号：EP3095137A2

公开(公告)日：2016-11-23

申请号：EP15742412.8

申请日：2015-01-15

申请人： The Regents Of The University Of Michigan

发明人： FORREST, Stephen, R. ,  LEE, Kyusang ,  FAN, Dejiu ,  ZIMMERMAN, Jeramy

IPC分类号： H01L31/0304 ,  H01L31/0687 ,  H01L31/0693 ,  H01L31/18 ,  H01L31/054

CPC分类号： H01L31/1896 ,  H01L31/03046 ,  H01L31/035281 ,  H01L31/0547 ,  H01L31/0687 ,  H01L31/0693 ,  H01L31/1892 ,  Y02E10/52 ,  Y02E10/544 ,  Y02P70/521

摘要： There is disclosed a method of preparing a photovoltaic device. In particular, the method comprises integrating epitaxial lift-off solar cells with mini-parabolic concentrator arrays via a printing method. Thus, there is disclosed a method comprising providing a growth substrate; depositing at least one protection layer on the growth substrate; depositing at least one sacrificial layer on the protection layer; depositing at least one photoactive cell on the sacrificial layer; etching a pattern of at least two parallel trenches that extend from the at least one photoactive cell to the sacrificial layer; depositing a metal on the at least one photoactive cell; bonding said metal to a host substrate; and removing the sacrificial layer with one or more etch steps. The host substrate can be a siloxane, which when rolled, can form a stamp used to integrate solar cells into concentrator arrays. There are also disclosed a method of making a growth substrate and the growth substrate made therefrom.