METROLOGY PROBE AND METHOD OF CONFIGURING A METROLOGY PROBE
    1.
    发明公开
    METROLOGY PROBE AND METHOD OF CONFIGURING A METROLOGY PROBE 审中-公开
    测量探针和方法进行配置的测量探头的

    公开(公告)号:EP2435837A2

    公开(公告)日:2012-04-04

    申请号:EP10781335.4

    申请日:2010-05-28

    CPC分类号: G01Q10/02 G01Q10/04 G01Q70/02

    摘要: A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low- pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input.