-
公开(公告)号：EP1105920A1
公开(公告)日：2001-06-13
申请号：EP99934886.5
申请日：1999-07-20
IPC分类号： H01L21/306 , C30B33/08 , C04B41/53
CPC分类号： H01L21/30635 , C30B29/30 , C30B33/00
摘要： A method of selectively etching a substrate ( 1 ) comprises applying etchant ( 4 ) at a surface of the substrate and illuminating an area of the surface with light from a light source ( 7 ), whereby etching is at least partially inhibited in the illuminated area ( 18 ) of the substrate. Preferably LiNbO3 is patterned in HF KOH, or HF-HNO3 solutions by selective illumination using UV laser light with 300 to 1000 mn wavelength, thereby allowing for interferometric or holographic structures to be formed.
-
公开(公告)号：EP1114343A1
公开(公告)日：2001-07-11
申请号：EP99946340.9
申请日：1999-09-14
发明人： SMITH, Peter George Robin , ROSS, Graeme William , HANNA, David Colin , SHEPHERD, David P. , GAWITH, Colin Barry Edmund
CPC分类号： G02F1/395 , G02B6/12 , G02B6/1342 , G02F1/3558 , G02F1/377 , G02F1/3775 , G02F2201/15 , G02F2202/07 , G02F2202/20
摘要： An optical waveguide comprising at least a guiding lamina (10) of optical material bonded by direct interfacial bonding to a superstructure lamina (20) of optical material, in which regions of the guiding lamina have modified optical properties so as to define a light guiding path along the guiding lamina. In a particular example, a periodically poled LiNbO3 planar waveguide is buried in LiTaO3 by direct interfacial bonding and precision polishing techniques and used in an optical frequency doubling system.
-
搜索结果
2 条记录 (耗时 0.009 秒)
