公开(公告)号：EP1158257B1

公开(公告)日：2004-10-27

申请号：EP99935126.5

申请日：1999-08-10

申请人： Toho Kasei Ltd. ,  Daikin Industries, Ltd.

发明人： MAEDA, Norio ,  SUMI, Koji ,  AIHARA, Hiroshi, Kanaoka Koujou, Sakai Seisakusho ,  OONO, Masao, Kanaoka Koujou, Sakai Seisakusho ,  IZUTANI, Naoaki, Kanaoka Koujou, Sakai Seisakusho

IPC分类号： F26B21/00 ,  H01L21/304

CPC分类号： H01L21/67051 ,  H01L21/67028 ,  H01L21/67034

摘要： A device for drying substrates which stores a plurality of substrates (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.

公开(公告)号：EP1158257A1

公开(公告)日：2001-11-28

申请号：EP99935126.5

申请日：1999-08-10

申请人： Toho Kasei Ltd. ,  Daikin Industries, Ltd.

发明人： MAEDA, Norio ,  SUMI, Koji ,  AIHARA, Hiroshi, Kanaoka Koujou, Sakai Seisakusho ,  OONO, Masao, Kanaoka Koujou, Sakai Seisakusho ,  IZUTANI, Naoaki, Kanaoka Koujou, Sakai Seisakusho

IPC分类号： F26B21/00 ,  H01L21/304

CPC分类号： H01L21/67051 ,  H01L21/67028 ,  H01L21/67034

摘要： A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.

摘要翻译： 一种用于干燥存储多个基板（1）的基板的装置，其中包括一个处理容器（3），清洗基板（1）之后清洁流体（2）被排出，并且用于注入干燥流体的喷嘴 位于供给管（4）的终端部分，通过该进料管供应液体干燥流体，从而消除或简化排气设备，并且干燥流体被顺利地供给。