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公开(公告)号:EP2843688A1
公开(公告)日:2015-03-04
申请号:EP13781218.6
申请日:2013-04-24
发明人: WATANABE, Junji , FUJITA, Takashi , IZUMI, Yasuo
IPC分类号: H01L21/301 , B24D3/00 , B24D5/00 , B24D5/12
摘要: An object of the present invention is to provide a dicing blade which does not cause cracking and breaking even in a workpiece formed from a brittle material, and can stably perform cutting process in a ductile mode on the workpiece with high precision. A dicing blade 26 which performs the cutting process on the workpiece is integrally formed of a diamond sintered body 80 which is formed by sintering diamond abrasive grains 82 so as to have a discoid shape, and a content of the diamond abrasive grains 82 of the diamond sintered body 80 is 80 vol% or more. It is preferable that recessed parts which are formed on a surface of the diamond sintered body 80 are continuously provided in an outer circumferential part of the dicing blade 26 along a circumferential direction.
摘要翻译: 本发明的目的是提供一种即使在由脆性材料形成的工件中也不会产生开裂和断裂的切割刀片,并且能够以高精度在工件上以延展性方式稳定地进行切割加工。 对工件进行切割处理的切割刀片26由金刚石烧结体80一体地形成,金刚石烧结体80通过烧结金刚石磨粒82形成为圆盘状,并且金刚石的金刚石磨粒82的含量 烧结体80为80体积%以上。 优选地,形成在金刚石烧结体80的表面上的凹部沿圆周方向连续地设置在切割刀26的外周部。
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公开(公告)号:EP2843688B1
公开(公告)日:2019-01-16
申请号:EP13781218.6
申请日:2013-04-24
发明人: WATANABE, Junji , FUJITA, Takashi , IZUMI, Yasuo
IPC分类号: H01L21/301 , B24D3/00 , B24D5/12
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