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公开(公告)号：EP2843688B1
公开(公告)日：2019-01-16
申请号：EP13781218.6
申请日：2013-04-24
发明人： WATANABE, Junji , FUJITA, Takashi , IZUMI, Yasuo
IPC分类号： H01L21/301 , B24D3/00 , B24D5/12
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公开(公告)号：EP2843688A1
公开(公告)日：2015-03-04
申请号：EP13781218.6
申请日：2013-04-24
发明人： WATANABE, Junji , FUJITA, Takashi , IZUMI, Yasuo
IPC分类号： H01L21/301 , B24D3/00 , B24D5/00 , B24D5/12
摘要： An object of the present invention is to provide a dicing blade which does not cause cracking and breaking even in a workpiece formed from a brittle material, and can stably perform cutting process in a ductile mode on the workpiece with high precision. A dicing blade 26 which performs the cutting process on the workpiece is integrally formed of a diamond sintered body 80 which is formed by sintering diamond abrasive grains 82 so as to have a discoid shape, and a content of the diamond abrasive grains 82 of the diamond sintered body 80 is 80 vol% or more. It is preferable that recessed parts which are formed on a surface of the diamond sintered body 80 are continuously provided in an outer circumferential part of the dicing blade 26 along a circumferential direction.
摘要翻译： 本发明的目的是提供一种即使在由脆性材料形成的工件中也不会产生开裂和断裂的切割刀片，并且能够以高精度在工件上以延展性方式稳定地进行切割加工。 对工件进行切割处理的切割刀片26由金刚石烧结体80一体地形成，金刚石烧结体80通过烧结金刚石磨粒82形成为圆盘状，并且金刚石的金刚石磨粒82的含量 烧结体80为80体积％以上。 优选地，形成在金刚石烧结体80的表面上的凹部沿圆周方向连续地设置在切割刀26的外周部。
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公开(公告)号：EP2879164B1
公开(公告)日：2017-09-13
申请号：EP13803775.9
申请日：2013-06-14
发明人： WATANABE, Junji , FUJITA, Takashi
CPC分类号： B24B19/02 , B24B9/065 , B24B27/06 , B24D5/12 , B28D5/0029
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公开(公告)号：EP2879164A1
公开(公告)日：2015-06-03
申请号：EP13803775.9
申请日：2013-06-14
发明人： WATANABE, Junji , FUJITA, Takashi
IPC分类号： H01L21/301 , B24D3/00 , B24D3/06 , B24D5/12
CPC分类号： B24B19/02 , B24B9/065 , B24B27/06 , B24D5/12 , B28D5/0029
摘要： To stably perform cutting process even on a workpiece formed from a brittle material, in a ductile mode with high precision, without causing cracking and/or breaking in the workpiece. A dicing device (10) which performs cutting process on a workpiece (W) includes: a dicing blade (26) that is formed into a discoid shape from a diamond sintered body (80) formed by sintering diamond abrasive grains, and contains 80 % or more of the diamond abrasive grains; a spindle (rotating mechanism) (28) configured to rotate the dicing blade (26); and a movement mechanism configured to move the workpiece (W) relatively to the dicing blade (26) while forming a constant cut depth on the workpiece (W) by the dicing blade (26).
摘要翻译： 为了即使在由脆性材料形成的工件上以高精度的延性模式稳定地进行切割处理，也不会在工件中产生开裂和/或断裂。 对工件（W）进行切割处理的切割装置（10）包括：切割刀片（26），其由通过烧结金刚石磨粒形成的金刚石烧结体（80）形成为圆盘状，并且包含80％ 或更多的金刚石磨粒; 构造成旋转切割刀片（26）的主轴（旋转机构）（28）; 以及移动机构，其构造成相对于切割刀片（26）移动工件（W），同时通过切割刀片（26）在工件（W）上形成恒定的切割深度。
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公开(公告)号：EP2990754B1
公开(公告)日：2017-10-11
申请号：EP14787627.0
申请日：2014-04-25
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公开(公告)号：EP2816322B1
公开(公告)日：2018-08-29
申请号：EP13748811.0
申请日：2013-02-12
发明人： SHIMIZU, Toru , OSAWA, Nobuyuki , FUJITA, Takashi
CPC分类号： G01D5/266 , G01D5/3473
摘要： A rotation angle measurement device includes: relative angle detection means 12 including a reference support 26 whose rotation is regulated in a fixed range in an arbitrary direction of a rotation axis, and a driving rotating body 22 which is coupled to the reference support 26 and is axially supported so as to be all-round rotatable with respect to the reference support 26, the relative angle detection means 12 which detects a relative rotation angle of the rotating body 22 with respect to the reference support 26; and non-contact angle detection means 40 which detects a rotation angle of the reference support 26 with reference to a position that does not contact with the rotating body 22 and the reference support 26. This provides improved accuracy in indexing the rotation angle of a rotating moving shaft and easy installation onto the rotating moving shaft.
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公开(公告)号：EP3346228A1
公开(公告)日：2018-07-11
申请号：EP17190580.5
申请日：2014-04-25
摘要： The present invention relates to a shape measuring machine (100) for measuring a contour and a roughness shape of a surface of a to-be-measured object, comprising: an arm (106) configured to rotate with a support unit (102) as a fulcrum (104); a stylus (110) configured to be brought into contact with the to-be-measured object, be displaced up and down following a surface shape of the to-be-measured object, and be mounted at one end of the arm (106); and a displacement sensor (112) and a scale detector (114) which at provided at the arm (106) to detect displacement of the arm (106) by displacement of the stylus (110), wherein the shape measuring machine (100) further comprises a correction processing unit (1570) configured to correct data of the displacement sensor (112) by data of the scale detector (114).
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8.发明公开
公开(公告)号：EP2816322A1
公开(公告)日：2014-12-24
申请号：EP13748811.0
申请日：2013-02-12
发明人： SHIMIZU, Toru , OSAWA, Nobuyuki , FUJITA, Takashi
CPC分类号： G01D5/266 , G01D5/3473
摘要： A rotation angle measurement device includes: relative angle detection means 12 including a reference support 26 whose rotation is regulated in a fixed range in an arbitrary direction of a rotation axis, and a driving rotating body 22 which is coupled to the reference support 26 and is axially supported so as to be all-round rotatable with respect to the reference support 26, the relative angle detection means 12 which detects a relative rotation angle of the rotating body 22 with respect to the reference support 26; and non-contact angle detection means 40 which detects a rotation angle of the reference support 26 with reference to a position that does not contact with the rotating body 22 and the reference support 26. This provides improved accuracy in indexing the rotation angle of a rotating moving shaft and easy installation onto the rotating moving shaft.
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公开(公告)号：EP3239649B1
公开(公告)日：2019-04-17
申请号：EP16743570.0
申请日：2016-01-29
发明人： KANNO, Yukio , GOMI, Keiichiro , FUJITA, Takashi
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公开(公告)号：EP3239649A1
公开(公告)日：2017-11-01
申请号：EP16743570.0
申请日：2016-01-29
发明人： KANNO, Yukio , GOMI, Keiichiro , FUJITA, Takashi
CPC分类号： G01B11/005 , G01B5/0004 , G01B5/0009 , G01B5/0014 , G01B5/008 , G01D5/34746
摘要： There is provided a three-dimensional coordinate measurement apparatus capable of reducing shaking of a Y carriage and improving measurement accuracy. A groove 40 is formed along a Y-axis direction in a right side part of a surface plate 10 made of stone, and a Y guide 42 is formed between the groove 40 and a right side surface 10R of the surface plate 10 to support a Y carriage in a portal shape in a movable manner in the Y-axis direction. A support section 50 is provided at a lower end of a right Y carriage 16 on the right side of the Y carriage, and the support section 50 is supported by the surface plate 10 through air pads 62F, 64F, 66F, 68F,..., which are disposed by two air pads back and forth on the corresponding one of a top surface 10T, a right side surface 10R, and a bottom surface 10B, of the surface plate 10, and a right side surface 40R of the groove 40.
摘要翻译： 提供了一种三维坐标测量设备，其能够减少Y滑架的晃动并提高测量精度。 在由石头制成的平台10的右侧部分沿Y轴方向形成凹槽40，并且在凹槽40与平台10的右侧表面10R之间形成Y引导件42以支撑 Y型滑架在Y轴方向上以可移动的方式呈门形。 支撑部分50设置在Y滑架右侧的右Y滑架16的下端，并且支撑部分50通过气垫62F，64F，66F，68F ...由平台10支撑。 它们通过两个气垫来回放置在平台10的顶面10T，右侧面10R和底面10B中的相应一个上，并且凹槽40的右侧面40R 。
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