Defect inspection method
    1.
    发明授权

    公开(公告)号:EP2816528B1

    公开(公告)日:2018-11-28

    申请号:EP14002109.8

    申请日:2014-06-18

    IPC分类号: G06T7/00 G06T7/13 G06T7/181

    摘要: There is provided a defect inspection method capable of detecting a crack with high accuracy. The defect inspection method includes the steps of: obtaining a shot image comprising pixels; and scanning the shot image in predetermined directions, and assigning a high evaluation value to a pixel M for each scanning direction when the luminance of the pixel M is lower than the luminances of first adjacent pixels K, O, located on both sides of the pixel M in the scanning direction and, in addition, the luminance of each of second adjacent pixels C, W, located on both sides of the pixel M in a direction perpendicular to the scanning direction, is lower than the luminances of third adjacent pixels A, E or U, Y located on both sides of the second adjacent pixel in the scanning direction. The method also includes the steps of selecting selection pixels based on the evaluation values of the pixels for each scanning direction; connecting the selection pixels for each scanning direction; and synthesizing the selection pixels of the predetermined scanning directions, and removing those pixels which do not meet the requirement for a predetermined shape from the selection pixels.

    Defect inspection method
    2.
    发明公开
    Defect inspection method 审中-公开
    Fehlerüberprüfungsverfahren

    公开(公告)号:EP2816528A1

    公开(公告)日:2014-12-24

    申请号:EP14002109.8

    申请日:2014-06-18

    IPC分类号: G06T7/00 G06T5/00

    摘要: There is provided a defect inspection method capable of detecting a crack with high accuracy. The defect inspection method includes the steps of: obtaining a shot image comprising pixels; and scanning the shot image in predetermined directions, and assigning a high evaluation value to a pixel M for each scanning direction when the luminance of the pixel M is lower than the luminances of first adjacent pixels K, O, located on both sides of the pixel M in the scanning direction and, in addition, the luminance of each of second adjacent pixels C, W, located on both sides of the pixel M in a direction perpendicular to the scanning direction, is lower than the luminances of third adjacent pixels A, E or U, Y located on both sides of the second adjacent pixel in the scanning direction. The method also includes the steps of selecting selection pixels based on the evaluation values of the pixels for each scanning direction; connecting the selection pixels for each scanning direction; and synthesizing the selection pixels of the predetermined scanning directions, and removing those pixels which do not meet the requirement for a predetermined shape from the selection pixels.

    摘要翻译: 提供了能够高精度地检测裂纹的缺陷检查方法。 缺陷检查方法包括以下步骤:获得包括像素的拍摄图像; 并且在像素M的亮度低于位于像素的两侧的第一相邻像素K,O的亮度时,针对每个扫描方向对像素M分配高评价值 M,并且另外,位于像素M的与扫描方向垂直的方向的两侧的第二相邻像素C,W的亮度比第三相邻像素A的亮度低, E或U,Y位于扫描方向上的第二相邻像素的两侧。 该方法还包括基于每个扫描方向的像素的评估值来选择选择像素的步骤; 连接每个扫描方向的选择像素; 以及合成预定扫描方向的选择像素,以及从选择像素中去除不满足预定形状的要素的那些像素。