专利检索 ap:("Tru-Si Technologies Inc.") AND inv:"BERGER, Alexander, J." 第 1 页

1.

发明公开
ARTICLE HOLDERS WITH SENSORS DETECTING A TYPE OF ARTICLE HELD BY THE HOLDER 有权
标题翻译：有传感器持有人的用于确定制品的技术，由保持器OBJECT被保持

公开(公告)号：EP1430513A1

公开(公告)日：2004-06-23

申请号：EP02740020.9

申请日：2002-07-08

申请人： Tru-Si Technologies Inc.

发明人： KRETZ, Frank, E. , BERGER, Alexander, J. , CASAROTTI, Sean, A.

IPC分类号： H01L21/00 , H01L21/66 , B25J9/00 , B23Q17/20 , G01D5/24

CPC分类号： H01L21/67271 , B25J13/087 , B25J19/02 , Y10S414/135 , Y10S414/141

摘要： An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.

2.

发明授权
ARTICLE HOLDERS WITH SENSORS DETECTING A TYPE OF ARTICLE HELD BY THE HOLDER 有权
标题翻译：有传感器持有人的用于确定制品的技术，由保持器OBJECT被保持

公开(公告)号：EP1430513B1

公开(公告)日：2007-01-03

申请号：EP02740020.9

申请日：2002-07-08

申请人： Tru-Si Technologies Inc.

发明人： KRETZ, Frank, E. , BERGER, Alexander, J. , CASAROTTI, Sean, A.

IPC分类号： H01L21/00 , H01L21/66 , B25J9/00 , B23Q17/20 , G01D5/24

CPC分类号： H01L21/67271 , B25J13/087 , B25J19/02 , Y10S414/135 , Y10S414/141

摘要： An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.