公开(公告)号：EP3170008A4

公开(公告)日：2018-06-06

申请号：EP15822414

申请日：2015-07-14

申请人： UNIV RUTGERS

发明人： ZOU QINGZE ,  REN JUAN ,  LIU JIANGBO

IPC分类号： G01Q10/06 ,  G01Q60/34

CPC分类号： G01Q10/065 ,  G01Q60/34

摘要： A method for imaging a sample using a high speed dynamic mode atomic force microscope may include scanning a tip of a cantilever probe over a surface of the sample, regulating a vibration amplitude of the tip to remain constant at a set point value (Aset), via a first signal generated in a first feedback controller, measuring a mean tapping deflection of the tip, regulating the mean tapping deflection via a second signal generated in a second feedback controller, tracking and measuring an adjustment to the measured mean tapping deflection during the regulating. The method may further include generating an image topography of the sample based on the first signal, the second signal, and the measured adjustment of the mean tapping deflection of the cantilever probe.