-
1.发明公开Optical irradiation equipment and optical irradiation method for nanoimprint lithography 审中-公开用于纳米压印光刻光学照射和照射光学方法
公开(公告)号：EP2354846A3
公开(公告)日：2015-03-25
申请号：EP11000620.2
申请日：2011-01-26
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/70875
摘要： An optical irradiation equipment provided with a cage body having an UV radiation transmission window, and an excimer lamp which is arranged in an interior of said cage body, wherein gas flow openings being connected to one of a cooling gas supply mechanism and a cooling gas suction mechanism are provided at a periphery of said UV radiation transmission window.
-
公开(公告)号：EP2166561B1
公开(公告)日：2016-03-30
申请号：EP09011676.5
申请日：2009-09-11
发明人： Nakashima, Akinobu , Tanino, Kenji
CPC分类号： H01K1/16 , H01K1/24 , H01K7/00 , H01K9/08 , H05B3/0047
-
公开(公告)号：EP2043405A2
公开(公告)日：2009-04-01
申请号：EP08015540.1
申请日：2008-09-03
发明人： Suzuki, Shinji , Nakashima, Akinobu
IPC分类号： H05B3/00
CPC分类号： H01L21/67109 , H01L21/67115
摘要： To provide a photo-irradiation type heat treatment apparatus that eliminates the adverse influence of a light transmitting window on the temperature distribution of an article to be treated without losing the original function of a reflecting mirror a photo-irradiation type heat treatment apparatus in which heat treating of an article is performed by irradiating the article with light emitted from multiple filament lamps through a light transmitting window, by providing the apparatus with a reflecting mirror having an opening at its central area so that cooling air can pass therethrough and by providing an air permeable reflector so as to cover the opening in the reflecting mirror.
摘要翻译： 为了提供光辐射型热处理装置，其消除了透光窗对待处理物品的温度分布的不利影响，而不会失去反射镜的原始功能，其中热照射型热处理装置 通过使设备具有在其中心区域具有开口的反射镜，使得冷却空气能够通过其中并且通过提供空气来对物品进行照射，该物品具有通过透光窗从多个灯丝灯发出的光 以便覆盖反射镜中的开口。
-
4.发明公开Optical irradiation equipment and optical irradiation method for nanoimprint lithography 审中-公开Optische Bestrahlungsvorrichtung und optisches Bestrahlungsverfahrenfürdie Nanoimprintlithographie
公开(公告)号：EP2354846A2
公开(公告)日：2011-08-10
申请号：EP11000620.2
申请日：2011-01-26
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/70875
摘要： An optical irradiation equipment provided with a cage body having an UV radiation transmission window, and an excimer lamp which is arranged in an interior of said cage body, wherein gas flow openings being connected to one of a cooling gas supply mechanism and a cooling gas suction mechanism are provided at a periphery of said UV radiation transmission window.
摘要翻译： 一种设置有具有紫外线透射窗的笼体的光照射装置和配置在所述笼体内部的准分子灯，其特征在于，所述气体流路开口与冷却气体供给机构和冷却气体吸入口 机构设置在所述UV辐射透射窗的周边。
-
公开(公告)号：EP2107596A2
公开(公告)日：2009-10-07
申请号：EP09004281.3
申请日：2009-03-25
发明人： Nakashima, Akinobu , Tanino, Kenji
摘要： To provide a filament lamp having a plurality of filaments disposed together in sequence in the tube axis direction of a light-emitting tube, with miniaturized hermetically sealed parts, by certain sheets of metal foil (26a,26b), of the plurality of metal foils (24a,24b,25a,25b,26a,26b), being disposed out of alignment with respect to the other of the metal foils (24a,24b,25a,25b) in both the tube axis direction as in a direction perpendicular to the tube axis direction.
摘要翻译： 为了提供一种丝束灯，其具有多个细丝，其沿着发光管的管轴方向依次布置在多个金属箔的某些金属箔（26a，26b）中，具有小型化的气密密封部分 （24a，24b，25a，25b，26a，26b），在与所述金属箔（24a，24b，25a，25b）垂直的方向上在管轴方向上相对于另一个金属箔 管轴方向。
-
公开(公告)号：EP2107596A3
公开(公告)日：2010-08-04
申请号：EP09004281.3
申请日：2009-03-25
发明人： Nakashima, Akinobu , Tanino, Kenji
摘要： To provide a filament lamp having a plurality of filaments disposed together in sequence in the tube axis direction of a light-emitting tube, with miniaturized hermetically sealed parts, by certain sheets of metal foil (26a,26b), of the plurality of metal foils (24a,24b,25a,25b,26a,26b), being disposed out of alignment with respect to the other of the metal foils (24a,24b,25a,25b) in both the tube axis direction as in a direction perpendicular to the tube axis direction.
摘要翻译： 为了提供一种白炽灯，其具有多个沿发光管的管轴方向依次设置在一起的灯丝，其中小型密封部件通过某些金属箔片（26a，26b）在多个金属箔片 （24a，24b，25a，25b，26a，26b）在垂直于所述金属箔（24a，24b，25a，25b）的垂直于所述管轴方向的两个方向上相对于另一个金属箔 管轴方向。
-
公开(公告)号：EP2166561A1
公开(公告)日：2010-03-24
申请号：EP09011676.5
申请日：2009-09-11
发明人： Nakashima, Akinobu , Tanino, Kenji
CPC分类号： H01K1/16 , H01K1/24 , H01K7/00 , H01K9/08 , H05B3/0047
摘要： A filament lamp having a filament and an internal lead in which the filament is insulated from contact with the internal lead and prevent from moving during operation to maintain a uniform distribution of light. To this end, the filament lamp includes a luminous tube having an inner wall, and opposing ends on which sealing parts are formed. Multiple filaments are sequentially disposed inside the tube in an axial direction, and internal leads are connected to each filament. An insulating wall is provided along the inner wall of the luminous tube in the axial direction and is disposed around at least one of the multiple filaments. Internal leads running partly parallel to the filaments are positioned between the luminous tube and insulating wall and do not engage the ring supporters of the multiple filaments, which could cause the filaments to move and distribute light in a nonuniform pattern.
摘要翻译： 具有灯丝和内部引线的白炽灯，其中灯丝与内部引线绝缘而不与内部引线接触，并防止在操作期间移动以保持均匀的光分布。 为此，灯丝灯包括具有内壁的发光管和形成有密封部的相对端。 沿着轴向依次配置多根细丝，内部引线与各细丝连接。 沿着发光管的内壁沿轴向设置绝缘壁，并且设置在多个细丝中的至少一个上。 部分平行于细丝的内部引线位于发光管和绝缘壁之间，并且不接合多根细丝的环状支撑体，这可能导致细丝以不均匀的图案移动和分布光。
-
公开(公告)号：EP1998358A2
公开(公告)日：2008-12-03
申请号：EP08009712.4
申请日：2008-05-28
CPC分类号： H01K1/16 , H01K1/24 , H01K1/38 , H01K7/00 , H01K9/08 , H01L21/67115 , H01S3/1618 , H05B3/0047
摘要： A filament lamp (1) includes multiple filament assemblies (41-45) having filaments (411-451) connected to paired leads (412,422,...), arrayed in order within a light emitting tube (2) and following a tube axis thereof. Each lead is electrically connected in a seal area (5a,b). Each filament is powered independently. The light emitting tube includes insulating walls or inner tubes (3) between the filaments and leads that have openings through which the leads pass, and located along the tube axis in proximity to the inner wall of the light emitting tube. Multiple lead accommodation spaces (111-115) corresponding to the number of leads are provided in the light emitting tube by the insulating walls with each lead passing through an opening in the insulating wall and placed without short circuits in its lead accommodation space.
摘要翻译： 灯丝灯（1）包括多根灯丝组件（41-45），灯丝组件具有连接到成对导线（412,422，...）上的灯丝（411-451），它们按顺序排列在发光管（2）内并沿着灯管轴 它们。 每条引线在密封区域（5a，b）电连接。 每根灯丝都独立供电。 发光管包括位于灯丝和引线之间的绝缘壁或内管（3），引线具有开口，引线通过该开口并且沿着管轴定位在发光管的内壁附近。 与发光管的数量相对应的多个引线容纳空间（111-115）通过绝缘壁设置在发光管中，其中每个引线穿过绝缘壁中的开口并且在其引线容纳空间中没有短路地放置。
-
-
-
-
-
-
-
搜索结果
8 条记录 (耗时 0.01 秒)
