EXCIMER LIGHT IRRADIATION DEVICE
    1.
    发明公开

    公开(公告)号:EP4102542A2

    公开(公告)日:2022-12-14

    申请号:EP22177475.5

    申请日:2022-06-07

    申请人: Unilam Co., Ltd.

    摘要: An embodiment of the present disclosure relates to a light irradiation device, which has high light irradiation efficiency and cooling efficiency and can be reduced in size. The light irradiation device according to an embodiment of the present disclosure includes an excimer lamp 110 including a light emitting tube 111 that emits light, and a lamp electrode 112 provided on an outside of the light emitting tube, and a case 120 including a case body 121 in which the excimer lamp is accommodated, a connection support 122 provided at one side of the case body to be connected to the lamp electrode, and a case electrode 123 provided at the other side of the case body to be in contact with a surface of the light emitting tube.

    EXCIMER LIGHT IRRADIATION DEVICE
    2.
    发明公开

    公开(公告)号:EP4102542A3

    公开(公告)日:2023-02-22

    申请号:EP22177475.5

    申请日:2022-06-07

    申请人: Unilam Co., Ltd.

    摘要: An embodiment of the present disclosure relates to a light irradiation device, which has high light irradiation efficiency and cooling efficiency and can be reduced in size. The light irradiation device according to an embodiment of the present disclosure includes an excimer lamp 110 including a light emitting tube 111 that emits light, and a lamp electrode 112 provided on an outside of the light emitting tube, and a case 120 including a case body 121 in which the excimer lamp is accommodated, a connection support 122 provided at one side of the case body to be connected to the lamp electrode, and a case electrode 123 provided at the other side of the case body to be in contact with a surface of the light emitting tube.