公开(公告)号：EP2630649A2

公开(公告)日：2013-08-28

申请号：EP11834932.3

申请日：2011-10-17

Applicant: Veeco Instruments Inc.

Inventor： HANSEN, Dennis ,  DEAKINS, James ,  CAMUS, Curtis

IPC: H01J37/08

CPC classification number: H01J37/3053 ,  H01J37/24 ,  H01J2237/08 ,  H02H3/247

Abstract: The presently disclosed technology provides a responsive ion beam source power supply system (200, 300, 400) capable of handling fault events without relying on conventional protection circuitry (e.g., fuses and breakers) so that physical power supply hardware intervention by a user is minimized for typical fault conditions and the ion beam source power supply system (200, 300, 400) may recover automatically after experiencing a fault condition. The presently disclosed technology further discloses an ion beam source power supply system (200, 300, 400) capable of detecting and diagnosing fault states, autonomously implementing command decisions to preserve or protect the function of other ion source modules or sub-systems, and/or mitigating or recovering from the disruptive fault event and returning the ion beam source system (100) to desired user settings.